Diffractometric methods for absolute measurement of diffraction-grating spacings

Tai Hyun Yoon, Cheon Il Eom, Myung Sai Chung, Hong Jin Kong

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

We propose one- and two-wavelength methods of absolute measurement of diffraction-grating spacings based on the Littman configuration for autocollimation. The one-wavelength method has been applied to measure the spacing of a grating with a nominal value of 2160 grooves/mm. The grating spacing was measured to be 463.16 nm, with an experimental standard deviation of 0.24 nm. It has been demonstrated that the both methods can provide direct traceability in the submicrometer region in terms of wavelength standards for applications in the field of nanometrology.

Original languageEnglish
Pages (from-to)107-109
Number of pages3
JournalOptics Letters
Volume24
Issue number2
DOIs
Publication statusPublished - 1999 Jan 15

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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