Diffuse diffracted features and ordered domain structures in GaInP layers grown by organometallic vapor phase epitaxy

Jung Ja Yang, Rafal Spirydon, Tae Yeon Seong, S. H. Lee, G. B. Stringfellow

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Transmission electron diffraction (TED) and transmission electron microscope (TEM) studies have been made of organometallic vapor phase epitaxial Ga xIn 1-xP layers (x ≈ 0.5) grown at temperatures in the range 570-690°C to investigate ordering and ordered domain structures. TED and TEM examination shows that the size and morphology of ordered domains depend on the growth temperature. The ordered domains change from a fine rod-like shape to a plate-like shape as the growth temperature increases. The domains are of width 0.6∼2 nm and of length 1∼10 nm. Characteristic diffuse features observed in TED patterns are found to depend on the growth temperature. Extensive computer simulations show a direct correlation between the ordered domain structures and such diffuse features. A possible model is suggested to describe the temperature dependence of the ordered domain structure.

Original languageEnglish
Pages (from-to)1117-1123
Number of pages7
JournalJournal of Electronic Materials
Volume27
Issue number10
Publication statusPublished - 1998 Oct 1
Externally publishedYes

Fingerprint

Vapor phase epitaxy
Organometallics
vapor phase epitaxy
Growth temperature
Electron diffraction
electron diffraction
Electron microscopes
electron microscopes
temperature
Diffraction patterns
Vapors
rods
diffraction patterns
examination
computerized simulation
Temperature
vapor phases
Computer simulation
temperature dependence

Keywords

  • GaInP
  • Ordering
  • Organometallic vapor phase epitaxy (OMVPE)
  • Transmission electron diffraction (TED)
  • Transmission electron microscopy (TEM)

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Materials Science(all)
  • Electronic, Optical and Magnetic Materials
  • Physics and Astronomy (miscellaneous)

Cite this

Diffuse diffracted features and ordered domain structures in GaInP layers grown by organometallic vapor phase epitaxy. / Yang, Jung Ja; Spirydon, Rafal; Seong, Tae Yeon; Lee, S. H.; Stringfellow, G. B.

In: Journal of Electronic Materials, Vol. 27, No. 10, 01.10.1998, p. 1117-1123.

Research output: Contribution to journalArticle

Yang, Jung Ja ; Spirydon, Rafal ; Seong, Tae Yeon ; Lee, S. H. ; Stringfellow, G. B. / Diffuse diffracted features and ordered domain structures in GaInP layers grown by organometallic vapor phase epitaxy. In: Journal of Electronic Materials. 1998 ; Vol. 27, No. 10. pp. 1117-1123.
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