Diffuse diffracted features and ordered domain structures in GaInP layers grown by organometallic vapor phase epitaxy

Jung Ja Yang, Rafal Spirydon, Tae Yeon Seong, S. H. Lee, G. B. Stringfellow

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Transmission electron diffraction (TED) and transmission electron microscope (TEM) studies have been made of organometallic vapor phase epitaxial GaxIn1-xP layers (x ≈ 0.5) grown at temperatures in the range 570-690°C to investigate ordering and ordered domain structures. TED and TEM examination shows that the size and morphology of ordered domains depend on the growth temperature. The ordered domains change from a fine rod-like shape to a plate-like shape as the growth temperature increases. The domains are of width 0.6∼2 nm and of length 1∼10 nm. Characteristic diffuse features observed in TED patterns are found to depend on the growth temperature. Extensive computer simulations show a direct correlation between the ordered domain structures and such diffuse features. A possible model is suggested to describe the temperature dependence of the ordered domain structure.

Original languageEnglish
Pages (from-to)1117-1123
Number of pages7
JournalJournal of Electronic Materials
Volume27
Issue number10
DOIs
Publication statusPublished - 1998 Oct

Keywords

  • GaInP
  • Ordering
  • Organometallic vapor phase epitaxy (OMVPE)
  • Transmission electron diffraction (TED)
  • Transmission electron microscopy (TEM)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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