Abstract
We found the simple, effective and low-cost fabrication method of scanning probe tip with carbon nanotube. The assembling apparatus has been discussed and a plausible explanation about attachment mechanism based on dielectrophoretic force has been suggested. In order to find the proper assembling condition, electric field analysis for the round shape tip has been accomplished. Using this condition, the scanning probe tips with carbon nanotube were fabricated at 25% success rate.
Original language | English |
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Pages (from-to) | 239-246 |
Number of pages | 8 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 5275 |
DOIs | |
Publication status | Published - 2004 |
Externally published | Yes |
Event | BioMEMS and Nanotechnology - Perth, WA, Australia Duration: 2003 Dec 10 → 2003 Dec 12 |
Keywords
- Carbon nanotube
- Dielectrophoresis
- Scanning probe microscope
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering