Direct comparison of the electrical properties in metal/oxide/nitride/oxide/silicon and metal/aluminum oxide/nitride/oxide/silicon capacitors with equivalent oxide thicknesses

Ho Myoung An, Yu Jeong Seo, Hee Dong Kim, Kyoung Chan Kim, Jong Guk Kim, Won Ju Cho, Jung Hyuk Koh, Yun Mo Sung, Tae Geun Kim

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7 Citations (Scopus)

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Engineering & Materials Science

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Chemical Compounds