Direct deposition of patterned nanocrystalline CVD diamond using an electrostatic self-assembly method with nanodiamond particles

Seung Koo Lee, Jong Hoon Kim, Min Goon Jeong, Min Jung Song, Dae-Soon Lim

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

Micron-sized and precise patterns of nanocrystalline CVD diamond were fabricated successfully on substrates using dispersed nanodiamond particles, charge connection by electrostatic self-assembly, and photolithography processes. Nanodiamond particles which had been dispersed using an attritional milling system were attached electrostatically on substrates as nuclei for diamond growth. In this milling process, poly sodium 4-styrene sulfonate (PSS) was added as an anionic dispersion agent to produce the PSS/nanodiamond conjugates. Ultra dispersed nanodiamond particles with a ζ-potential and average particle size of -60.5 mV and ∼15 nm, respectively, were obtained after this milling process. These PSS/nanodiamond conjugates were attached electrostatically to a cationic polyethyleneimine (PEI) coated surface on to which a photoresist had been patterned in an aqueous solution of the PSS/nanodiamond conjugated suspension. A selectively seeded area was formed successfully using the above process. A hot filament chemical vapor deposition system was used to synthesize the nanocrystalline CVD diamond on the seeded area. Micron-sized, thin and precise nanocrystalline CVD diamond patterns with a high nucleation density (3.8 ± 0.4 × 1011 cm -2) and smooth surface were consequently fabricated.

Original languageEnglish
Article number505302
JournalNanotechnology
Volume21
Issue number50
DOIs
Publication statusPublished - 2010 Dec 17

Fingerprint

Nanodiamonds
Diamond
Static Electricity
Self assembly
Chemical vapor deposition
Electrostatics
Diamonds
Styrene
Sodium
Polyethyleneimine
Photolithography
Substrates
Photoresists
Particle Size
Suspensions
Nucleation
Particle size
styrenesulfonic acid polymer

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Mechanics of Materials
  • Materials Science(all)

Cite this

Direct deposition of patterned nanocrystalline CVD diamond using an electrostatic self-assembly method with nanodiamond particles. / Lee, Seung Koo; Kim, Jong Hoon; Jeong, Min Goon; Song, Min Jung; Lim, Dae-Soon.

In: Nanotechnology, Vol. 21, No. 50, 505302, 17.12.2010.

Research output: Contribution to journalArticle

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