@article{a9aa036838784d938e29f09d6c493bee,
title = "Direct Measurement of Ion Diffusivity in Oxide Thin Film by Using Isotope Tracers and Secondary Ion Mass Spectrometry",
abstract = "Diffusion of oxide ions along heterostructured yttria-stabilized zirconia (YSZ) epitaxially grown on single crystalline MgO (001) is investigated. Pulsed laser deposition is used for the epitaxial growth and focused ion beam was applied to open the lateral surface of the YSZ-MgO interface layers and to enable incorporation and diffusion of oxygen. The sample is annealed in 18O2 environment to trace oxide ion transport with Al2O3 layers atop to block diffusion perpendicular to surface of the YSZ plane. Time-of-flight secondary mass ion spectrometry (TOF–SIMS) analyze the planar diffusion profiles. Diffusivity and surface exchange rate are estimated by SIMS data fitting. As a result, it is identified that both oxide ion diffusion and surface incorporation rates are significantly enhanced on surface of the heterostructured YSZ on MgO (001) compared to bulk YSZ.",
keywords = "Heterostructure, Ion diffusion, Isotope tracer, Stain effect, Surface exchange, Yttria-stabilized zirconia",
author = "Kiho Bae and Jang, {Dong Young} and Park, {Joong Sun} and Son, {Ji Won} and Prinz, {Fritz B.} and Shim, {Joon Hyung}",
note = "Funding Information: This research was supported by the Hydrogen Energy Innovation Technology Development Program of the National Research Foundation (NRF) of Korea funded by the Korean Ministry of Science and ICT (MSIT) (No. NRF-2019M3E6A1064697). This work was also supported by the Korea Electric Power Corporation (Grant Number: R17XA05-57), the Agency for Defense Development (UD170107GD), Republic of Korea and Korea University Internal Grant. YSZ Yttria-stabilized zirconia STO Strontium titanate PLD Pulsed laser deposition FIB Focused ion beam SEM Scanning electron microscopy TOF–SIMS Time-of-flight secondary ion mass spectrometry XRD X-ray diffraction k Surface exchange coefficient (cm/s) D Oxide ion self-diffusion coefficient (cm 2 /s) c gas Relative concentration of 18 O in the environment gas during the ion diffusion c surface Relative concentration of 18 O at the surface c Realtive concentration of 18 O in YSZ h k/D c hg Relative natural background concentration of 18 O ALD Atomic layer deposition Funding Information: This research was supported by the Hydrogen Energy Innovation Technology Development Program of the National Research Foundation (NRF) of Korea?funded by the Korean Ministry of Science and ICT (MSIT)?(No. NRF-2019M3E6A1064697).?This work was also supported by the Korea Electric Power Corporation (Grant Number: R17XA05-57),?the Agency for Defense Development (UD170107GD), Republic of Korea?and Korea University Internal Grant. Publisher Copyright: {\textcopyright} 2019, Korean Society for Precision Engineering.",
year = "2020",
month = mar,
day = "1",
doi = "10.1007/s40684-019-00169-3",
language = "English",
volume = "7",
pages = "405--410",
journal = "International Journal of Precision Engineering and Manufacturing - Green Technology",
issn = "2288-6206",
publisher = "Springer Science + Business Media",
number = "2",
}