Direct patterning process for tungsten trioxide nano-to-micro structures

Sungjin Moon, Hak Jong Choi, Junho Jun, Daihong Huh, Chaehyun Kim, Hee Chul Lee, Heon Lee

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Compared to conventional and complex processes, including deposition, photolithography, and plasma-etching processes, WO3 nano-to-micro structures were successfully fabricated using direct imprinting process using WO3 nanoparticle-dispersed resin and consecutive annealing on any substrates in a simpler and more cost-effective manner. WO3 nanoparticle dispersed resins with various concentrations were evaluated for direct imprinting of WO3. The pattern fidelity and the surface morphology of imprinted WO3 nano-to-micro structures were characterized with field emission SEM. X-ray diffractionpattern was used to investigate the effect of annealing process on crystallinity of WO3 nano-to-micro structures. The crystal structure of imprinted WO3 was transformed from a hexagonal phase into a monoclinic phase by annealing. Optical transmittance of WO3 structures were also investigated using UV-vis spectroscopy. It was confirmed that diffused transmittance of WO3 structures could be increased up to 70% at 550 nm of wavelength without noticeable reduction of total transmittance, which is potentially applicable in the field of optoelectronic devices. Photo-electrochemical cells made of imprinted WO3 structure were properly operated.

Original languageEnglish
Pages (from-to)582-591
Number of pages10
JournalApplied Spectroscopy Reviews
Volume51
Issue number7-9
DOIs
Publication statusPublished - 2016 Aug 8

Fingerprint

Tungsten
transmittance
tungsten
Annealing
resins
microstructure
Microstructure
annealing
Resins
Nanoparticles
Photoelectrochemical cells
nanoparticles
Plasma etching
electrochemical cells
Opacity
Photolithography
plasma etching
photolithography
optoelectronic devices
Ultraviolet spectroscopy

Keywords

  • direct imprinting
  • nano-to-micro structure
  • nanoparticle-dispersed resin
  • photocurrent
  • photoelectrochemical cell
  • Tungsten trioxide (WO )

ASJC Scopus subject areas

  • Spectroscopy
  • Instrumentation

Cite this

Direct patterning process for tungsten trioxide nano-to-micro structures. / Moon, Sungjin; Choi, Hak Jong; Jun, Junho; Huh, Daihong; Kim, Chaehyun; Lee, Hee Chul; Lee, Heon.

In: Applied Spectroscopy Reviews, Vol. 51, No. 7-9, 08.08.2016, p. 582-591.

Research output: Contribution to journalArticle

Moon, Sungjin ; Choi, Hak Jong ; Jun, Junho ; Huh, Daihong ; Kim, Chaehyun ; Lee, Hee Chul ; Lee, Heon. / Direct patterning process for tungsten trioxide nano-to-micro structures. In: Applied Spectroscopy Reviews. 2016 ; Vol. 51, No. 7-9. pp. 582-591.
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