Direct Probing of Cross-Plane Thermal Properties of Atomic Layer Deposition Al 2 O 3 /ZnO Superlattice Films with an Improved Figure of Merit and Their Cross-Plane Thermoelectric Generating Performance

No Won Park, Won Yong Lee, Yo Seop Yoon, Jay Young Ahn, Jung Hoon Lee, Gil Sung Kim, Tae Geun Kim, Chel Jong Choi, Jin Seong Park, Eiji Saitoh, Sang Kwon Lee

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Engineering & Materials Science

Chemical Compounds