Direct-write nanolighography on flexible substrate

Jiyoung Chang, Michael Dommer, Byung Yang Lee, Liwei Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a mask-less lithography process using direct-write nanofibers via near-field electrospinning on flexible substrate as masking materials in processes such as lift-off, wet-etching and dry-etching. The polymer fibers have diameter of sub-micrometer to micrometer with good adhesion to substrate and chemical sustainability. Key demonstrations successfully realized in this work include sub-micrometer metal gaps, micro heaters and definition of graphene structures on flexible substrates. As such, this direct-write lithography technique could find applications in low-cost microelectronics, including flexible electronics.

Original languageEnglish
Title of host publicationTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop
PublisherTransducer Research Foundation
Pages441-444
Number of pages4
ISBN (Print)9780964002494
Publication statusPublished - 2012
Externally publishedYes
Event2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012 - Hilton Head, United States
Duration: 2012 Jun 32012 Jun 7

Other

Other2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012
CountryUnited States
CityHilton Head
Period12/6/312/6/7

Fingerprint

Lithography
Substrates
Flexible electronics
Dry etching
Wet etching
Electrospinning
Nanofibers
Microelectronics
Graphene
Sustainable development
Masks
Demonstrations
Adhesion
Fibers
Polymers
Metals
Costs

Keywords

  • Electrospinning
  • Flexible electronics
  • Mask-less lithography

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Hardware and Architecture

Cite this

Chang, J., Dommer, M., Lee, B. Y., & Lin, L. (2012). Direct-write nanolighography on flexible substrate. In Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 441-444). Transducer Research Foundation.

Direct-write nanolighography on flexible substrate. / Chang, Jiyoung; Dommer, Michael; Lee, Byung Yang; Lin, Liwei.

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop. Transducer Research Foundation, 2012. p. 441-444.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chang, J, Dommer, M, Lee, BY & Lin, L 2012, Direct-write nanolighography on flexible substrate. in Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop. Transducer Research Foundation, pp. 441-444, 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012, Hilton Head, United States, 12/6/3.
Chang J, Dommer M, Lee BY, Lin L. Direct-write nanolighography on flexible substrate. In Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop. Transducer Research Foundation. 2012. p. 441-444
Chang, Jiyoung ; Dommer, Michael ; Lee, Byung Yang ; Lin, Liwei. / Direct-write nanolighography on flexible substrate. Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop. Transducer Research Foundation, 2012. pp. 441-444
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