Dispersion of nanodiamond on chemical mechanical polishing performance for Ge1Sb6Te3 film

Il Ho Yang, Min Jung Song, Dong Hee Shin, Seung Koo Lee, Eung Rim Hwang, Dae Soon Lim

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy

Medicine & Life Sciences