Downsizing gas sensors based on semiconducting metal oxide: Effects of electrodes on gas sensing properties

Young Geun Song; Young Seok Shim; Sangtae Kim; Soo Deok Han; Hi Gyu Moon; Myoung Sub Noh; Kwangjae Lee; Hae Ryong Lee; Jin Sang Kim; Byeong Kwon Ju; Chong Yun Kang

doi:10.1016/j.snb.2017.02.035

Downsizing gas sensors based on semiconducting metal oxide: Effects of electrodes on gas sensing properties

Young Geun Song, Young Seok Shim, Sangtae Kim, Soo Deok Han, Hi Gyu Moon, Myoung Sub Noh, Kwangjae Lee, Hae Ryong Lee, Jin Sang Kim, Byeong Kwon Ju, Chong Yun Kang

Research output: Contribution to journal › Article › peer-review

28 Citations (Scopus)

Abstract

We report the highly sensitive and selective downsized gas sensors for the IoT application. Sensing areas of Pt-interdigitated electrodes (IDEs) were varied to investigate the relation between sensing materials and electrodes. In₂O₃ nanocolumns were deposited on the pre-patterned Pt IDEs using glancing angle deposition (GLAD). The effect of the interface resistance between electrodes and sensing materials, and the intergrain resistance between nanocolumns is analyzed by linear regression at different sensing area and incident angle of GLAD. In₂O₃ (angle: 85°, sensing area: 0.3 mm × 0.3 mm) nanocolumns with double Schottky barriers show the highest response and selectivity with fast response time of 10 s to VOCs among the samples fabricated in this study. The analysis reveals that the intrinsic response of In₂O₃ (angle: 85°, sensing area: 0.3 mm × 0.3 mm) nanocolumns are dominantly affected by intergrain resistance, resulting in a high response. Our demonstration for the fundamental aspect of downsizing gas sensor makes an important contribution to the chemical sensor field with broad interest.

Original language	English
Pages (from-to)	949-956
Number of pages	8
Journal	Sensors and Actuators, B: Chemical
Volume	248
DOIs	https://doi.org/10.1016/j.snb.2017.02.035
Publication status	Published - 2017

Keywords

Gas sensor
InO nanocolumn
Interdigitated electrodes
Internet of things
Miniaturization

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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10.1016/j.snb.2017.02.035

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title = "Downsizing gas sensors based on semiconducting metal oxide: Effects of electrodes on gas sensing properties",

abstract = "We report the highly sensitive and selective downsized gas sensors for the IoT application. Sensing areas of Pt-interdigitated electrodes (IDEs) were varied to investigate the relation between sensing materials and electrodes. In2O3 nanocolumns were deposited on the pre-patterned Pt IDEs using glancing angle deposition (GLAD). The effect of the interface resistance between electrodes and sensing materials, and the intergrain resistance between nanocolumns is analyzed by linear regression at different sensing area and incident angle of GLAD. In2O3 (angle: 85°, sensing area: 0.3 mm × 0.3 mm) nanocolumns with double Schottky barriers show the highest response and selectivity with fast response time of 10 s to VOCs among the samples fabricated in this study. The analysis reveals that the intrinsic response of In2O3 (angle: 85°, sensing area: 0.3 mm × 0.3 mm) nanocolumns are dominantly affected by intergrain resistance, resulting in a high response. Our demonstration for the fundamental aspect of downsizing gas sensor makes an important contribution to the chemical sensor field with broad interest.",

keywords = "Gas sensor, InO nanocolumn, Interdigitated electrodes, Internet of things, Miniaturization",

author = "Song, {Young Geun} and Shim, {Young Seok} and Sangtae Kim and Han, {Soo Deok} and Moon, {Hi Gyu} and Noh, {Myoung Sub} and Kwangjae Lee and Lee, {Hae Ryong} and Kim, {Jin Sang} and Ju, {Byeong Kwon} and Kang, {Chong Yun}",

note = "Publisher Copyright: {\textcopyright} 2017 Elsevier B.V.",

year = "2017",

doi = "10.1016/j.snb.2017.02.035",

language = "English",

volume = "248",

pages = "949--956",

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T1 - Downsizing gas sensors based on semiconducting metal oxide

T2 - Effects of electrodes on gas sensing properties

AU - Song, Young Geun

AU - Shim, Young Seok

AU - Kim, Sangtae

AU - Han, Soo Deok

AU - Moon, Hi Gyu

AU - Noh, Myoung Sub

AU - Lee, Kwangjae

AU - Lee, Hae Ryong

AU - Kim, Jin Sang

AU - Ju, Byeong Kwon

AU - Kang, Chong Yun

PY - 2017

Y1 - 2017

N2 - We report the highly sensitive and selective downsized gas sensors for the IoT application. Sensing areas of Pt-interdigitated electrodes (IDEs) were varied to investigate the relation between sensing materials and electrodes. In2O3 nanocolumns were deposited on the pre-patterned Pt IDEs using glancing angle deposition (GLAD). The effect of the interface resistance between electrodes and sensing materials, and the intergrain resistance between nanocolumns is analyzed by linear regression at different sensing area and incident angle of GLAD. In2O3 (angle: 85°, sensing area: 0.3 mm × 0.3 mm) nanocolumns with double Schottky barriers show the highest response and selectivity with fast response time of 10 s to VOCs among the samples fabricated in this study. The analysis reveals that the intrinsic response of In2O3 (angle: 85°, sensing area: 0.3 mm × 0.3 mm) nanocolumns are dominantly affected by intergrain resistance, resulting in a high response. Our demonstration for the fundamental aspect of downsizing gas sensor makes an important contribution to the chemical sensor field with broad interest.

AB - We report the highly sensitive and selective downsized gas sensors for the IoT application. Sensing areas of Pt-interdigitated electrodes (IDEs) were varied to investigate the relation between sensing materials and electrodes. In2O3 nanocolumns were deposited on the pre-patterned Pt IDEs using glancing angle deposition (GLAD). The effect of the interface resistance between electrodes and sensing materials, and the intergrain resistance between nanocolumns is analyzed by linear regression at different sensing area and incident angle of GLAD. In2O3 (angle: 85°, sensing area: 0.3 mm × 0.3 mm) nanocolumns with double Schottky barriers show the highest response and selectivity with fast response time of 10 s to VOCs among the samples fabricated in this study. The analysis reveals that the intrinsic response of In2O3 (angle: 85°, sensing area: 0.3 mm × 0.3 mm) nanocolumns are dominantly affected by intergrain resistance, resulting in a high response. Our demonstration for the fundamental aspect of downsizing gas sensor makes an important contribution to the chemical sensor field with broad interest.

KW - Gas sensor

KW - InO nanocolumn

KW - Interdigitated electrodes

KW - Internet of things

KW - Miniaturization

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JO - Sensors and Actuators, B: Chemical

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Downsizing gas sensors based on semiconducting metal oxide: Effects of electrodes on gas sensing properties

Abstract

Keywords

ASJC Scopus subject areas

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