Downsizing gas sensors based on semiconducting metal oxide: Effects of electrodes on gas sensing properties

Young Geun Song, Young Seok Shim, Sangtae Kim, Soo Deok Han, Hi Gyu Moon, Myoung Sub Noh, Kwangjae Lee, Hae Ryong Lee, Jin Sang Kim, Byeong Kwon Ju, Chong-Yun Kang

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

We report the highly sensitive and selective downsized gas sensors for the IoT application. Sensing areas of Pt-interdigitated electrodes (IDEs) were varied to investigate the relation between sensing materials and electrodes. In2O3 nanocolumns were deposited on the pre-patterned Pt IDEs using glancing angle deposition (GLAD). The effect of the interface resistance between electrodes and sensing materials, and the intergrain resistance between nanocolumns is analyzed by linear regression at different sensing area and incident angle of GLAD. In2O3 (angle: 85°, sensing area: 0.3 mm × 0.3 mm) nanocolumns with double Schottky barriers show the highest response and selectivity with fast response time of 10 s to VOCs among the samples fabricated in this study. The analysis reveals that the intrinsic response of In2O3 (angle: 85°, sensing area: 0.3 mm × 0.3 mm) nanocolumns are dominantly affected by intergrain resistance, resulting in a high response. Our demonstration for the fundamental aspect of downsizing gas sensor makes an important contribution to the chemical sensor field with broad interest.

Original languageEnglish
Pages (from-to)949-956
Number of pages8
JournalSensors and Actuators, B: Chemical
Volume248
DOIs
Publication statusPublished - 2017

Keywords

  • Gas sensor
  • InO nanocolumn
  • Interdigitated electrodes
  • Internet of things
  • Miniaturization

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry
  • Electrical and Electronic Engineering

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  • Cite this

    Song, Y. G., Shim, Y. S., Kim, S., Han, S. D., Moon, H. G., Noh, M. S., Lee, K., Lee, H. R., Kim, J. S., Ju, B. K., & Kang, C-Y. (2017). Downsizing gas sensors based on semiconducting metal oxide: Effects of electrodes on gas sensing properties. Sensors and Actuators, B: Chemical, 248, 949-956. https://doi.org/10.1016/j.snb.2017.02.035