Driving characteristics of the electrowetting-on-dielectric device using atomic-layer-deposited aluminum oxide as the dielectric

Engineering & Materials Science

• Dielectric devices 100%
• Aluminum oxide 54%
• Atomic layer deposition 37%
• Electrodes 31%
• Electric potential 20%
• High-k dielectric 12%
• Contacts (fluid mechanics) 10%
• Polytetrafluoroethylenes 9%
• Threshold voltage 8%
• Surface active agents 8%
• Microfluidics 8%
• Surface treatment 8%
• Coatings 6%
• Oils 5%

Physics & Astronomy

• aluminum oxides 46%
• atomic layer epitaxy 19%
• electrodes 19%
• electric potential 10%
• teflon (trademark) 7%
• surface treatment 6%
• low voltage 6%
• surfactants 6%
• threshold voltage 5%
• oils 5%
• high voltages 5%

Chemical Compounds

• Dielectric Material 49%
• Voltage 27%
• Atomic Layer Epitaxy 21%
• Reference Electrode 13%
• Behavior as Electrode 9%
• Hydrophobic Surface 6%
• Velocity 5%