Dry Process based Infrared Sensors with CNT Film Absorber

Kum Pyo Yoo, Hyun Pyo Hong, Lee Taek Lim, Chang Seon Choi, Dong Il Lee, Cheol Jin Lee, Chan Won Park, Nam Ki Min

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)


In this paper, we describe the fabrication and characterization of a front-side micromachined thermopiles consisting of a suspended membrane and a carbon nanotube (CNT) film absorber. Thermocouples of 52 pairs which are composed of phosphorous-doped silicon and aluminum were formed and connected in series. A CNT film collected by filter was transferred on hot junction. A CNT absorber has an absorptance of about 50% in the midinfrared region. The suspended membrane was fabricated by an isotropic silicon dry etching process with XeF2 gas at the front side of the substrates. The output voltage with the CNT film is found to be 250.2 mV at 7 mW of incident power, approximately 1.8 times higher than that of one without an absorber.

Original languageEnglish
Title of host publication18th International Vacuum Congress, IVC 2010
EditorsFeng Pan, Xu Chen
PublisherElsevier B.V.
Number of pages8
ISBN (Electronic)9781627487481
Publication statusPublished - 2012
Event18th International Vacuum Congress, IVC 2010 - Beijing, China
Duration: 2010 Aug 232010 Aug 27

Publication series

NamePhysics Procedia
ISSN (Print)1875-3884
ISSN (Electronic)1875-3892


Other18th International Vacuum Congress, IVC 2010

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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