@inproceedings{9d05b9ae12dc4d00951e53a5e47d75f2,
title = "Dry Process based Infrared Sensors with CNT Film Absorber",
abstract = "In this paper, we describe the fabrication and characterization of a front-side micromachined thermopiles consisting of a suspended membrane and a carbon nanotube (CNT) film absorber. Thermocouples of 52 pairs which are composed of phosphorous-doped silicon and aluminum were formed and connected in series. A CNT film collected by filter was transferred on hot junction. A CNT absorber has an absorptance of about 50% in the midinfrared region. The suspended membrane was fabricated by an isotropic silicon dry etching process with XeF2 gas at the front side of the substrates. The output voltage with the CNT film is found to be 250.2 mV at 7 mW of incident power, approximately 1.8 times higher than that of one without an absorber.",
author = "Yoo, {Kum Pyo} and Hong, {Hyun Pyo} and Lim, {Lee Taek} and Choi, {Chang Seon} and Lee, {Dong Il} and Lee, {Cheol Jin} and Park, {Chan Won} and Min, {Nam Ki}",
note = "Funding Information: This work was supported by the Mid-career Researcher Program through an NRF grant funded by the MEST (No. 2009-0085863) of the Korean government. Publisher Copyright: {\textcopyright} 2012 Published by Elsevier B.V.; 18th International Vacuum Congress, IVC 2010 ; Conference date: 23-08-2010 Through 27-08-2010",
year = "2012",
doi = "10.1016/j.phpro.2012.03.519",
language = "English",
series = "Physics Procedia",
publisher = "Elsevier B.V.",
pages = "63--70",
editor = "Feng Pan and Xu Chen",
booktitle = "18th International Vacuum Congress, IVC 2010",
}