Early Diagnosis and Prediction of Wafer Quality Using Machine Learning on sub-10nm Logic Technology

Heung Kook Ko, Sena Park, Jihyun Ryu, Sung Ryul Kim, Giwon Lee, Dongjoon Lee, Sangwoo Pae, Euncheol Lee, Yongsun Ji, Hia Jiang, Tae Young Jeong, Taiki Uemura, Dongkyun Kwon, Hyungrok Do, Hyungu Kahng, Yoon Sang Cho, Jiyoon Lee, Seoung Bum Kim

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Fingerprint

Dive into the research topics of 'Early Diagnosis and Prediction of Wafer Quality Using Machine Learning on sub-10nm Logic Technology'. Together they form a unique fingerprint.

Engineering & Materials Science