Economic analysis of waste recycle process in perhydropolysiloxazane synthesis

Huichan Yun, Seungjong Yeom, Dae Ryook Yang

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The perhydropolysiloxazane (PHPS) solution has been widely used in the spin-on-dielectric (SOD) process to form silicon oxide layer on a wafer in semiconductor industries. To reduce the whole semiconductor manufacturing cost, the process of PHPS solution production requires high productivity as well as low production cost. A large portion of the PHPS solution production cost is attributed to the large usage of solvents (pyridine and xylene), because more than 20 times of solvents in mass are required to produce a unit mass of high purity PHPS solution. Therefore, we suggest several plausible solvent regeneration processes of organic solvent waste from the PHPS solution production, and their economics is evaluated for comparison.

Original languageEnglish
Pages (from-to)748-753
Number of pages6
JournalKorean Journal of Chemical Engineering
Volume31
Issue number5
DOIs
Publication statusPublished - 2014 Jan 1

    Fingerprint

Keywords

  • Economic Analysis
  • Perhydropolysiloxazane
  • Pyridine
  • Recycle

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)

Cite this