Effect of atmospheric-plasma treatments for enhancing adhesion of au on parylene-c-coated protein chips

Kyo Seon Hwang, Jung Ho Park, Jeong Hoon Lee, Dae Sung Yoon, Tae Song Kim, Inho Han, Joo Hyon Noh

Research output: Contribution to journalArticle

19 Citations (Scopus)


We have developed a new passivation method of MEMS-based biosensors using parylene-c for application of an electrical protein mass detection system in a liquid environment. Because the adhesion property of gold for protein-protein interactions on parylene-c is poor, we performed atmospheric-plasma treatment of the parylene-c surface for adhesion enhancement. The surface properties of the treated parylene-c surfaces were investigated by measuring the contact angle, calculating the surface energy, observing the microstructure with a scanning electron microscope images, measuring the root-mean-square (RMS) roughness, and performing tape-test analysis. The surface energy increase of parylene-c due to the atmospheric-plasma treatment was demonstrated using the water-drop method with water and formamide. An atmospheric-plasma treatment for 120 seconds was beneficial, resulting in a surface energy increase of gold on the parylene-c films. The adhesion improvement of gold on the parylene-c was attributed to increased grain size and increased RMS roughness.

Original languageEnglish
Pages (from-to)1168-1172
Number of pages5
JournalJournal of the Korean Physical Society
Issue number5 I
Publication statusPublished - 2004 May 1



  • Adhesion
  • Atmosphere plasma
  • Contact angle
  • Parylene-c

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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