Effect of atmospheric-plasma treatments for enhancing adhesion of au on parylene-c-coated protein chips

Kyo Seon Hwang, Jung ho Park, Jeong Hoon Lee, Dae Sung Yoon, Tae Song Kim, Inho Han, Joo Hyon Noh

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

We have developed a new passivation method of MEMS-based biosensors using parylene-c for application of an electrical protein mass detection system in a liquid environment. Because the adhesion property of gold for protein-protein interactions on parylene-c is poor, we performed atmospheric-plasma treatment of the parylene-c surface for adhesion enhancement. The surface properties of the treated parylene-c surfaces were investigated by measuring the contact angle, calculating the surface energy, observing the microstructure with a scanning electron microscope images, measuring the root-mean-square (RMS) roughness, and performing tape-test analysis. The surface energy increase of parylene-c due to the atmospheric-plasma treatment was demonstrated using the water-drop method with water and formamide. An atmospheric-plasma treatment for 120 seconds was beneficial, resulting in a surface energy increase of gold on the parylene-c films. The adhesion improvement of gold on the parylene-c was attributed to increased grain size and increased RMS roughness.

Original languageEnglish
Pages (from-to)1168-1172
Number of pages5
JournalJournal of the Korean Physical Society
Volume44
Issue number5 I
Publication statusPublished - 2004 May 1

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surface energy
adhesion
chips
gold
proteins
roughness
bioinstrumentation
surface properties
water
tapes
passivity
microelectromechanical systems
electron microscopes
grain size
microstructure
scanning
augmentation
liquids
interactions

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Effect of atmospheric-plasma treatments for enhancing adhesion of au on parylene-c-coated protein chips. / Hwang, Kyo Seon; Park, Jung ho; Lee, Jeong Hoon; Yoon, Dae Sung; Kim, Tae Song; Han, Inho; Noh, Joo Hyon.

In: Journal of the Korean Physical Society, Vol. 44, No. 5 I, 01.05.2004, p. 1168-1172.

Research output: Contribution to journalArticle

Hwang, Kyo Seon ; Park, Jung ho ; Lee, Jeong Hoon ; Yoon, Dae Sung ; Kim, Tae Song ; Han, Inho ; Noh, Joo Hyon. / Effect of atmospheric-plasma treatments for enhancing adhesion of au on parylene-c-coated protein chips. In: Journal of the Korean Physical Society. 2004 ; Vol. 44, No. 5 I. pp. 1168-1172.
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AU - Kim, Tae Song

AU - Han, Inho

AU - Noh, Joo Hyon

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