Effect of barrier layers on the properties of indium tin oxide thin films on soda lime glass substrates

Jung Min Lee, Byung Hyun Choi, Mi Jung Ji, Yong Tae An, Jung ho Park, Jae Hong Kwon, Byeong Kwon Ju

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

In this paper, the electrical, structural and optical properties of indium tin oxide (ITO) films deposited on soda lime glass (SLG) haven been investigated, along with high strain point glass (HSPG) substrate, through radio frequency magnetron sputtering using a ceramic target (In2O3:SnO2, 90:10 wt.%). The ITO films deposited on the SLG show a high electrical resistivity and structural defects compared with those deposited on HSPG due to the Na ions from the SLG diffusing to the ITO film by annealing. However, these properties can be improved by intercalating a barrier layer of SiO2 or Al2O3 between the ITO film and the SLG substrate. SIMS analysis has confirmed that the barrier layer inhibits the Na ion's diffusion from the SLG. In particular, the ITO films deposited on the Al2O3 barrier layer, show better properties than those deposited on the SiO2 barrier layer.

Original languageEnglish
Pages (from-to)4074-4077
Number of pages4
JournalThin Solid Films
Volume517
Issue number14
DOIs
Publication statusPublished - 2009 May 29

Fingerprint

calcium oxides
barrier layers
Tin oxides
Lime
indium oxides
Indium
tin oxides
Oxide films
Glass
Thin films
oxide films
glass
Substrates
thin films
Ions
Secondary ion mass spectrometry
soda lime
indium tin oxide
Magnetron sputtering
secondary ion mass spectrometry

Keywords

  • Barrier layer
  • Diffusion
  • Indium tin oxide (ITO)
  • RF-magnetron sputtering
  • Soda lime glass (SLG)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Effect of barrier layers on the properties of indium tin oxide thin films on soda lime glass substrates. / Lee, Jung Min; Choi, Byung Hyun; Ji, Mi Jung; An, Yong Tae; Park, Jung ho; Kwon, Jae Hong; Ju, Byeong Kwon.

In: Thin Solid Films, Vol. 517, No. 14, 29.05.2009, p. 4074-4077.

Research output: Contribution to journalArticle

Lee, Jung Min ; Choi, Byung Hyun ; Ji, Mi Jung ; An, Yong Tae ; Park, Jung ho ; Kwon, Jae Hong ; Ju, Byeong Kwon. / Effect of barrier layers on the properties of indium tin oxide thin films on soda lime glass substrates. In: Thin Solid Films. 2009 ; Vol. 517, No. 14. pp. 4074-4077.
@article{999902655e554d03bf5f6026296f89d7,
title = "Effect of barrier layers on the properties of indium tin oxide thin films on soda lime glass substrates",
abstract = "In this paper, the electrical, structural and optical properties of indium tin oxide (ITO) films deposited on soda lime glass (SLG) haven been investigated, along with high strain point glass (HSPG) substrate, through radio frequency magnetron sputtering using a ceramic target (In2O3:SnO2, 90:10 wt.{\%}). The ITO films deposited on the SLG show a high electrical resistivity and structural defects compared with those deposited on HSPG due to the Na ions from the SLG diffusing to the ITO film by annealing. However, these properties can be improved by intercalating a barrier layer of SiO2 or Al2O3 between the ITO film and the SLG substrate. SIMS analysis has confirmed that the barrier layer inhibits the Na ion's diffusion from the SLG. In particular, the ITO films deposited on the Al2O3 barrier layer, show better properties than those deposited on the SiO2 barrier layer.",
keywords = "Barrier layer, Diffusion, Indium tin oxide (ITO), RF-magnetron sputtering, Soda lime glass (SLG)",
author = "Lee, {Jung Min} and Choi, {Byung Hyun} and Ji, {Mi Jung} and An, {Yong Tae} and Park, {Jung ho} and Kwon, {Jae Hong} and Ju, {Byeong Kwon}",
year = "2009",
month = "5",
day = "29",
doi = "10.1016/j.tsf.2009.01.149",
language = "English",
volume = "517",
pages = "4074--4077",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",
number = "14",

}

TY - JOUR

T1 - Effect of barrier layers on the properties of indium tin oxide thin films on soda lime glass substrates

AU - Lee, Jung Min

AU - Choi, Byung Hyun

AU - Ji, Mi Jung

AU - An, Yong Tae

AU - Park, Jung ho

AU - Kwon, Jae Hong

AU - Ju, Byeong Kwon

PY - 2009/5/29

Y1 - 2009/5/29

N2 - In this paper, the electrical, structural and optical properties of indium tin oxide (ITO) films deposited on soda lime glass (SLG) haven been investigated, along with high strain point glass (HSPG) substrate, through radio frequency magnetron sputtering using a ceramic target (In2O3:SnO2, 90:10 wt.%). The ITO films deposited on the SLG show a high electrical resistivity and structural defects compared with those deposited on HSPG due to the Na ions from the SLG diffusing to the ITO film by annealing. However, these properties can be improved by intercalating a barrier layer of SiO2 or Al2O3 between the ITO film and the SLG substrate. SIMS analysis has confirmed that the barrier layer inhibits the Na ion's diffusion from the SLG. In particular, the ITO films deposited on the Al2O3 barrier layer, show better properties than those deposited on the SiO2 barrier layer.

AB - In this paper, the electrical, structural and optical properties of indium tin oxide (ITO) films deposited on soda lime glass (SLG) haven been investigated, along with high strain point glass (HSPG) substrate, through radio frequency magnetron sputtering using a ceramic target (In2O3:SnO2, 90:10 wt.%). The ITO films deposited on the SLG show a high electrical resistivity and structural defects compared with those deposited on HSPG due to the Na ions from the SLG diffusing to the ITO film by annealing. However, these properties can be improved by intercalating a barrier layer of SiO2 or Al2O3 between the ITO film and the SLG substrate. SIMS analysis has confirmed that the barrier layer inhibits the Na ion's diffusion from the SLG. In particular, the ITO films deposited on the Al2O3 barrier layer, show better properties than those deposited on the SiO2 barrier layer.

KW - Barrier layer

KW - Diffusion

KW - Indium tin oxide (ITO)

KW - RF-magnetron sputtering

KW - Soda lime glass (SLG)

UR - http://www.scopus.com/inward/record.url?scp=65449137843&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=65449137843&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2009.01.149

DO - 10.1016/j.tsf.2009.01.149

M3 - Article

AN - SCOPUS:65449137843

VL - 517

SP - 4074

EP - 4077

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

IS - 14

ER -