Effect of capping layer on the crystallization of amorphous CoFeB

Ha Chang Chung, Young Ho Lee, Seong Rae Lee

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

We investigated the effects of capping layer on the crystallization of amorphous top-CoFeB electrode in the glass/CoFeB/MgO(001)/CoFeB/cap stack. Evolution of texture and crystallization of the top-CoFeB electrode can be affected by the texture and the crystallinity of the capping layer. When the (002)-textured Ru capping layer was used, a (110) texture of CoFeB was developed during annealing at 350°C for 90 min. On the other hand, when the amorphous TiAl capping layer was used, a (002) texture of the CoFeB was developed during crystallization due to MgO (001) texture seeding effect. Consequently, the texture evolution of the amorphous top-CoFeB electrode during annealing could be controlled by the texture and crystallinity of the adjacent capping layer.

Original languageEnglish
Pages (from-to)3995-3998
Number of pages4
JournalPhysica Status Solidi (A) Applications and Materials Science
Volume204
Issue number12
DOIs
Publication statusPublished - 2007 Dec

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

Fingerprint Dive into the research topics of 'Effect of capping layer on the crystallization of amorphous CoFeB'. Together they form a unique fingerprint.

  • Cite this