Effect of cation non-stoichiometry and crystallinity on the ionic conductivity of atomic layer deposited Y: BaZrO3 films

Joong Sun Park, Young Beom Kim, Jihwan An, Joon Hyung Shim, Turgut M. Gür, Fritz B. Prinz

Research output: Contribution to journalArticle

10 Citations (Scopus)


The effects of A-site non-stoichiometry and crystallinity on the proton conductivity of anhydrous proton conducting yttria-doped barium zirconate (BYZ) thin film were investigated. The membranes were fabricated by atomic layer deposition (ALD) as it allows tailoring and varying the concentration of barium. Electrochemical impedance spectroscopy was conducted to investigate the ionic conductivity according to the stoichiometry and crystallinity of the ALD BYZ thin films.

Original languageEnglish
Pages (from-to)166-169
Number of pages4
JournalThin Solid Films
Publication statusPublished - 2013 Jul 31



  • Atomic layer deposition
  • Cation crystallinity
  • Fuel Cells
  • Ionic conductivity
  • Proton conducting ceramic
  • Yttrium-doped barium zirconate

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this