Effect of CMP on the Te segregation in Ge 2Sb 2Te 5 films

Dong Hee Shin, Dong Hyun Lee, Min Gun Jeong, Hyung Soon Park, Dae Soon Lim

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Effect of CMP on the Te segregation in Ge 2Sb 2Te 5 films'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds