Effect of diamond-like carbon coating on the emission characteristics of molybdenum field emitter arrays

Jae Hoon Jung, Byeong Kwon Ju, Hoon Kim, Yun Lee Hi, Suk Jae Chung, Jin Jang, Myung Hwan Oh

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

We have studied the electron emission characteristics of Mo field emitter arrays (FEA's) using a diamond-like carbon (DLC) film deposited by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55 to 30 V by a 20-nm thick hydrogen-free DLC coating and maximum emission current was increased from 166 to 831 juA. Also the gate voltage required to get the anode current of 0.1 (juA/emitter) decreases from 77 to 48 V. Furthermore the emission current from DLC coated Mo FEA's is more stable than that of noncoated Mo FEA's.

Original languageEnglish
Pages (from-to)2232-2237
Number of pages6
JournalIEEE Transactions on Electron Devices
Volume45
Issue number10
DOIs
Publication statusPublished - 1998

Keywords

  • Emission current
  • Emission stability
  • Hydrogenfree dlc
  • Mo fea's pecvd

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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