Effect of diamond-like carbon coating on the emission characteristics of molybdenum field emitter arrays

Jae Hoon Jung, Byeong Kwon Ju, Hoon Kim, Yun-Hi Lee, Suk Jae Chung, Jin Jang, Myung Hwan Oh

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6 Citations (Scopus)

Abstract

We have studied the electron emission characteristics of Mo field emitter arrays (FEA's) using a diamond-like carbon (DLC) film deposited by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55 to 30 V by a 20-nm thick hydrogen-free DLC coating and maximum emission current was increased from 166 to 831 juA. Also the gate voltage required to get the anode current of 0.1 (juA/emitter) decreases from 77 to 48 V. Furthermore the emission current from DLC coated Mo FEA's is more stable than that of noncoated Mo FEA's.

Original languageEnglish
Pages (from-to)2232-2237
Number of pages6
JournalIEEE Transactions on Electron Devices
Volume45
Issue number10
DOIs
Publication statusPublished - 1998 Dec 1
Externally publishedYes

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Keywords

  • Emission current
  • Emission stability
  • Hydrogenfree dlc
  • Mo fea's pecvd

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)

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