Effect of different sputtering gas mixtures on the structural, electrical, and optical properties of p-type nio thin films

Joon Ho Oh, Soon Yong Hwang, Young Dong Kim, Jun Hyuk Song, Tae Yeon Seong

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We investigated how mixtures of Ar and 02 or N2 gases affect the structural, electrical and optical properties of RF-magnetron-sputtered NiO films. It is shown that the addition of 02 gas to Ar ambient (namely, Ar:o2=2:1 to 1:2) slightly reduces the (2 0 0) texturing of the NiO films. The introduction of N2 gas (from 0 to 2 seem) to Ar:02(2:1) mixture enhances the (2 0 0) texturing, while the addition of N2 gas (from 0 to 2 seem) to Ar ambient slightly weakens the (1 1 1) texturing. The deposition rate is reduced from 6.1 to 1.5 nm/min when o2 gas is added to Ar ambient. The addition of N2 gas to the Ar:o2(2:1) mixture slightly increases the deposition rate from 1.8 to 2.6 nm/min, whereas adding N2 gas to Ar only ambient somewhat reduces the rate from 6.1 to 4.4 nm/min. The carrier concentration of the films is increased and the mobility is decreased as the o2 flow rate in the Ar:o2mixture is increased. The addition of N2 gas to the Ar:o2 (2:1) mixture increases the resistivity of the films, while adding N2 gas to Ar ambient decreases the resistivity. The transmittance and optical bandgap of the films are reduced (from 58.4 to 45.5% at 550 nm and from 3.5 to 3.3 eV, respectively) with increasing 02 flow to Ar ambient When N2 gas is added to the Ar:o2 (2:1) mixture, the transmittance in the visible wavelength range increases from 58.4 to 71.3% and the optical bandgap increases from 3.5 to 3.6 eV. However, adding N2 gas to the Ar only ambient results in decrease in the transmittance in the visible wavelength region (from 69.3 to 56%) and the optical bandgap (from 3.7 to 3.5 eV).

Original languageEnglish
Pages (from-to)1346-1351
Number of pages6
JournalMaterials Science in Semiconductor Processing
Issue number5
Publication statusPublished - 2013 Jan 1



  • Magnetron sputtering
  • Nio
  • Resistivity
  • Transmittance

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

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