Effect of electron beam irradiation on the electrical and optical properties of ITO/Ag/ITO and IZO/Ag/IZO films

C. H. Hong, Y. J. Jo, H. A. Kim, In-Hwan Lee, J. S. Kwak

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

We have investigated the effect of electron beam irradiation as well as insertion of a Ag layer on the electrical and optical properties of the ITO or IZO films. The results show that electron beam irradiation as well as inserting a very thin Ag layer can significantly reduce sheet resistance of the ITO/Ag/ITO and IZO/Ag/IZO films. The electron beam irradiation also increases light transmittance and optical band gap of the ITO/Ag/ITO multilayer films; meanwhile, it has not influence on the transmittance of the IZO/Ag/IZO films. These results can be explained by that In and Zn cation in IZO film have strong tendency to preserve their coordination with oxygen.

Original languageEnglish
Pages (from-to)6829-6833
Number of pages5
JournalThin Solid Films
Volume519
Issue number20
DOIs
Publication statusPublished - 2011 Aug 1
Externally publishedYes

Fingerprint

ITO (semiconductors)
Electron beams
Electric properties
Optical properties
electrical properties
Irradiation
electron beams
optical properties
irradiation
transmittance
Multilayer films
Sheet resistance
Optical band gaps
Cations
Positive ions
Oxygen
insertion
tendencies
cations
oxygen

Keywords

  • Electron beam
  • TCO

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Effect of electron beam irradiation on the electrical and optical properties of ITO/Ag/ITO and IZO/Ag/IZO films. / Hong, C. H.; Jo, Y. J.; Kim, H. A.; Lee, In-Hwan; Kwak, J. S.

In: Thin Solid Films, Vol. 519, No. 20, 01.08.2011, p. 6829-6833.

Research output: Contribution to journalArticle

Hong, C. H. ; Jo, Y. J. ; Kim, H. A. ; Lee, In-Hwan ; Kwak, J. S. / Effect of electron beam irradiation on the electrical and optical properties of ITO/Ag/ITO and IZO/Ag/IZO films. In: Thin Solid Films. 2011 ; Vol. 519, No. 20. pp. 6829-6833.
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