Abstract
Pristine ZnO thin films have been deposited with zinc acetate [Zn(CH 3COO)2], mono-ethanolamine (stabilizer), and isopropanol solutions by sol-gel method. After deposition, pristine ZnO thin films have been irradiated by excimer laser (λ = 248, KrF) source with energy density of 50 mJ/cm2 for 30 sec. The effect of excimer laser annealing on the optical and structural properties of ZnO thin films are investigated by photoluminescence and field emission scanning electron microscope. As-grown ZnO thin films show a huge peak of visible region and a wide full width at half maximum (FWHM) of UV region due to low quality with amorphous ZnO thin films. After KrF excimer laser annealing, ZnO thin films show intense near-band-edge (NBE) emission and weak deep-level emission. The optically improved pristine ZnO thin films have demonstrated that excimer laser annealing is novel treatment process at room temperature.
| Original language | English |
|---|---|
| Pages (from-to) | 585-588 |
| Number of pages | 4 |
| Journal | Current Applied Physics |
| Volume | 12 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2012 Mar 1 |
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Keywords
- Excimer laser
- Laser annealing
- ZnO
ASJC Scopus subject areas
- Materials Science(all)
- Physics and Astronomy(all)
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Effect of excimer laser annealing on the properties of ZnO thin film prepared by sol-gel method. / Kim, Kyoungwon; Kim, Sangsig; Lee, Sang Yeol.
In: Current Applied Physics, Vol. 12, No. 2, 01.03.2012, p. 585-588.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Effect of excimer laser annealing on the properties of ZnO thin film prepared by sol-gel method
AU - Kim, Kyoungwon
AU - Kim, Sangsig
AU - Lee, Sang Yeol
PY - 2012/3/1
Y1 - 2012/3/1
N2 - Pristine ZnO thin films have been deposited with zinc acetate [Zn(CH 3COO)2], mono-ethanolamine (stabilizer), and isopropanol solutions by sol-gel method. After deposition, pristine ZnO thin films have been irradiated by excimer laser (λ = 248, KrF) source with energy density of 50 mJ/cm2 for 30 sec. The effect of excimer laser annealing on the optical and structural properties of ZnO thin films are investigated by photoluminescence and field emission scanning electron microscope. As-grown ZnO thin films show a huge peak of visible region and a wide full width at half maximum (FWHM) of UV region due to low quality with amorphous ZnO thin films. After KrF excimer laser annealing, ZnO thin films show intense near-band-edge (NBE) emission and weak deep-level emission. The optically improved pristine ZnO thin films have demonstrated that excimer laser annealing is novel treatment process at room temperature.
AB - Pristine ZnO thin films have been deposited with zinc acetate [Zn(CH 3COO)2], mono-ethanolamine (stabilizer), and isopropanol solutions by sol-gel method. After deposition, pristine ZnO thin films have been irradiated by excimer laser (λ = 248, KrF) source with energy density of 50 mJ/cm2 for 30 sec. The effect of excimer laser annealing on the optical and structural properties of ZnO thin films are investigated by photoluminescence and field emission scanning electron microscope. As-grown ZnO thin films show a huge peak of visible region and a wide full width at half maximum (FWHM) of UV region due to low quality with amorphous ZnO thin films. After KrF excimer laser annealing, ZnO thin films show intense near-band-edge (NBE) emission and weak deep-level emission. The optically improved pristine ZnO thin films have demonstrated that excimer laser annealing is novel treatment process at room temperature.
KW - Excimer laser
KW - Laser annealing
KW - ZnO
UR - http://www.scopus.com/inward/record.url?scp=81155123054&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=81155123054&partnerID=8YFLogxK
U2 - 10.1016/j.cap.2011.09.006
DO - 10.1016/j.cap.2011.09.006
M3 - Article
AN - SCOPUS:81155123054
VL - 12
SP - 585
EP - 588
JO - Current Applied Physics
JF - Current Applied Physics
SN - 1567-1739
IS - 2
ER -