Effect of Hydrogen Annealing on Contact Resistance Reduction of Metal-Interlayer-n-Germanium Source/Drain Structure

Gwang Sik Kim, Gwangwe Yoo, Yujin Seo, Seung Hwan Kim, Karam Cho, Byung Jin Cho, Changhwan Shin, Jin Hong Park, Hyun Yong Yu

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science