Effect of N doping on the electron emission properties of diamondlike carbon film on a 2-in. Mo field emitter array panel

Jae Hoon Jung, Byeong Kwon Ju, Hoon Kim, Myung Hwan Oh, Suk Jae Chung, Jin Jang

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

We have studied the enhancement of field-emission characteristics by hydrogen-free nitrogen-doped diamondlike carbon (DLC) coating on Mo-tip field emitter arrays by a layer-by-layer technique using plasma-enhanced chemical vapor deposition. The Spindt-type molybdenum tip is used as an emission source without a resistive layer on the silicon substrate. The maximum emission current for each pixel was increased from 160 to 1520 μA by a 20 nm N-doped DLC coating. Furthermore, the emission current from DLC-coated field emitter arrays (FEAs) is more stable than that of noncoated FEAs.

Original languageEnglish
Pages (from-to)705-709
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume16
Issue number2
Publication statusPublished - 1998 Mar 1
Externally publishedYes

Fingerprint

Carbon films
Electron emission
electron emission
emitters
Doping (additives)
Carbon
carbon
coatings
Coatings
Plasma enhanced chemical vapor deposition
Field emission
Molybdenum
molybdenum
field emission
Pixels
pixels
vapor deposition
Nitrogen
nitrogen
Silicon

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)
  • Surfaces and Interfaces

Cite this

Effect of N doping on the electron emission properties of diamondlike carbon film on a 2-in. Mo field emitter array panel. / Jung, Jae Hoon; Ju, Byeong Kwon; Kim, Hoon; Oh, Myung Hwan; Chung, Suk Jae; Jang, Jin.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 16, No. 2, 01.03.1998, p. 705-709.

Research output: Contribution to journalArticle

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AU - Jang, Jin

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