Abstract
We have studied the enhancement of field-emission characteristics by hydrogen-free nitrogen-doped diamondlike carbon (DLC) coating on Mo-tip field emitter arrays by a layer-by-layer technique using plasma-enhanced chemical vapor deposition. The Spindt-type molybdenum tip is used as an emission source without a resistive layer on the silicon substrate. The maximum emission current for each pixel was increased from 160 to 1520 μA by a 20 nm N-doped DLC coating. Furthermore, the emission current from DLC-coated field emitter arrays (FEAs) is more stable than that of noncoated FEAs.
| Original language | English |
|---|---|
| Pages (from-to) | 705-709 |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 16 |
| Issue number | 2 |
| Publication status | Published - 1998 Mar 1 |
| Externally published | Yes |
Fingerprint
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Physics and Astronomy (miscellaneous)
- Surfaces and Interfaces
Cite this
Effect of N doping on the electron emission properties of diamondlike carbon film on a 2-in. Mo field emitter array panel. / Jung, Jae Hoon; Ju, Byeong Kwon; Kim, Hoon; Oh, Myung Hwan; Chung, Suk Jae; Jang, Jin.
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 16, No. 2, 01.03.1998, p. 705-709.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Effect of N doping on the electron emission properties of diamondlike carbon film on a 2-in. Mo field emitter array panel
AU - Jung, Jae Hoon
AU - Ju, Byeong Kwon
AU - Kim, Hoon
AU - Oh, Myung Hwan
AU - Chung, Suk Jae
AU - Jang, Jin
PY - 1998/3/1
Y1 - 1998/3/1
N2 - We have studied the enhancement of field-emission characteristics by hydrogen-free nitrogen-doped diamondlike carbon (DLC) coating on Mo-tip field emitter arrays by a layer-by-layer technique using plasma-enhanced chemical vapor deposition. The Spindt-type molybdenum tip is used as an emission source without a resistive layer on the silicon substrate. The maximum emission current for each pixel was increased from 160 to 1520 μA by a 20 nm N-doped DLC coating. Furthermore, the emission current from DLC-coated field emitter arrays (FEAs) is more stable than that of noncoated FEAs.
AB - We have studied the enhancement of field-emission characteristics by hydrogen-free nitrogen-doped diamondlike carbon (DLC) coating on Mo-tip field emitter arrays by a layer-by-layer technique using plasma-enhanced chemical vapor deposition. The Spindt-type molybdenum tip is used as an emission source without a resistive layer on the silicon substrate. The maximum emission current for each pixel was increased from 160 to 1520 μA by a 20 nm N-doped DLC coating. Furthermore, the emission current from DLC-coated field emitter arrays (FEAs) is more stable than that of noncoated FEAs.
UR - http://www.scopus.com/inward/record.url?scp=0039098604&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0039098604&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:0039098604
VL - 16
SP - 705
EP - 709
JO - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
JF - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
SN - 1071-1023
IS - 2
ER -