Effect of Plasma Pretreatment of Soda-Lime Glass on the Preferred Orientation of TiO 2 Prepared by PECVD

J. Jhin, P. Kang, K. Kang, Dong Jin Byun

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

TiO 2 has environmental application due to its unique photoinduced properties such as antibacterial and superhydrophilic functions, It is reported that crystalline structure and orientation of TiO 2 thin film affect photocatalytic efficiency. And our previous study showed that <112>-preferred orientation TiO 2 film resulted in the better photocatalytic efficiency. <112>-oriented TiO 2 thin films were fabricated on sodalime glass substrate using PECVD methods. This study was the effort to find the correlation between pretreatment with plasma and <112>-preferred orientation of TiO 2 thin films. The PECVD methods were used at the relatively low substrate temperature of the range from 250° to 412° in order to avoid Na + diffusion from the soda-lime glass substrate into TiO 2 layer during deposition. Plasma pretreatment drives soda-lime glass to have high roughness and high surface energy because its contribution to a shift in Si-O- (non-bridging) due to sodium ion depletion at the soda-lime glass surface. And that results are confirmed through the investigation of AFM and contact angle measurement. Pretreatment with plasma was used for changing the surface characteristics of soda lime soda-lime glass to fabricate <112>-preferred orientation of TiO 2 thin films. The facet of the <112>-oriented film consists of {100} and {004} facet planes. {100} facet planes are so unstable that they have the high surface energy because they show no interrupted chain of strong bond, in crystalline TiO 2. <112>-oriented film consisted of {100} facet planes with high surface energy will prefer to be deposited on the unstable substrate with high surface energy better than on the stable substrate. The XRD and SEM results showed TiO 2 thin films deposited on the soda-lime glass pretreated with plasma have a preference of <112>-orientation. Finally, plasma pretreatment drove TiO 2 thin films to have <112>-preferred orientation through improving the surface of soda-lime glass.

Original languageEnglish
Title of host publicationIEEE International Conference on Plasma Science
Pages290
Number of pages1
Publication statusPublished - 2003
Event2003 IEEE International Conference on Plasma Science - Jeju, Korea, Republic of
Duration: 2003 Jun 22003 Jun 5

Other

Other2003 IEEE International Conference on Plasma Science
CountryKorea, Republic of
CityJeju
Period03/6/203/6/5

Fingerprint

calcium oxides
pretreatment
glass
surface energy
flat surfaces
thin films
depletion
roughness
sodium
atomic force microscopy
scanning electron microscopy
shift
ions

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Jhin, J., Kang, P., Kang, K., & Byun, D. J. (2003). Effect of Plasma Pretreatment of Soda-Lime Glass on the Preferred Orientation of TiO 2 Prepared by PECVD In IEEE International Conference on Plasma Science (pp. 290)

Effect of Plasma Pretreatment of Soda-Lime Glass on the Preferred Orientation of TiO 2 Prepared by PECVD . / Jhin, J.; Kang, P.; Kang, K.; Byun, Dong Jin.

IEEE International Conference on Plasma Science. 2003. p. 290.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Jhin, J, Kang, P, Kang, K & Byun, DJ 2003, Effect of Plasma Pretreatment of Soda-Lime Glass on the Preferred Orientation of TiO 2 Prepared by PECVD in IEEE International Conference on Plasma Science. pp. 290, 2003 IEEE International Conference on Plasma Science, Jeju, Korea, Republic of, 03/6/2.
Jhin J, Kang P, Kang K, Byun DJ. Effect of Plasma Pretreatment of Soda-Lime Glass on the Preferred Orientation of TiO 2 Prepared by PECVD In IEEE International Conference on Plasma Science. 2003. p. 290
Jhin, J. ; Kang, P. ; Kang, K. ; Byun, Dong Jin. / Effect of Plasma Pretreatment of Soda-Lime Glass on the Preferred Orientation of TiO 2 Prepared by PECVD IEEE International Conference on Plasma Science. 2003. pp. 290
@inproceedings{fd1899375f0b4189823b1790ab77c69f,
title = "Effect of Plasma Pretreatment of Soda-Lime Glass on the Preferred Orientation of TiO 2 Prepared by PECVD",
abstract = "TiO 2 has environmental application due to its unique photoinduced properties such as antibacterial and superhydrophilic functions, It is reported that crystalline structure and orientation of TiO 2 thin film affect photocatalytic efficiency. And our previous study showed that <112>-preferred orientation TiO 2 film resulted in the better photocatalytic efficiency. <112>-oriented TiO 2 thin films were fabricated on sodalime glass substrate using PECVD methods. This study was the effort to find the correlation between pretreatment with plasma and <112>-preferred orientation of TiO 2 thin films. The PECVD methods were used at the relatively low substrate temperature of the range from 250° to 412° in order to avoid Na + diffusion from the soda-lime glass substrate into TiO 2 layer during deposition. Plasma pretreatment drives soda-lime glass to have high roughness and high surface energy because its contribution to a shift in Si-O- (non-bridging) due to sodium ion depletion at the soda-lime glass surface. And that results are confirmed through the investigation of AFM and contact angle measurement. Pretreatment with plasma was used for changing the surface characteristics of soda lime soda-lime glass to fabricate <112>-preferred orientation of TiO 2 thin films. The facet of the <112>-oriented film consists of {100} and {004} facet planes. {100} facet planes are so unstable that they have the high surface energy because they show no interrupted chain of strong bond, in crystalline TiO 2. <112>-oriented film consisted of {100} facet planes with high surface energy will prefer to be deposited on the unstable substrate with high surface energy better than on the stable substrate. The XRD and SEM results showed TiO 2 thin films deposited on the soda-lime glass pretreated with plasma have a preference of <112>-orientation. Finally, plasma pretreatment drove TiO 2 thin films to have <112>-preferred orientation through improving the surface of soda-lime glass.",
author = "J. Jhin and P. Kang and K. Kang and Byun, {Dong Jin}",
year = "2003",
language = "English",
pages = "290",
booktitle = "IEEE International Conference on Plasma Science",

}

TY - GEN

T1 - Effect of Plasma Pretreatment of Soda-Lime Glass on the Preferred Orientation of TiO 2 Prepared by PECVD

AU - Jhin, J.

AU - Kang, P.

AU - Kang, K.

AU - Byun, Dong Jin

PY - 2003

Y1 - 2003

N2 - TiO 2 has environmental application due to its unique photoinduced properties such as antibacterial and superhydrophilic functions, It is reported that crystalline structure and orientation of TiO 2 thin film affect photocatalytic efficiency. And our previous study showed that <112>-preferred orientation TiO 2 film resulted in the better photocatalytic efficiency. <112>-oriented TiO 2 thin films were fabricated on sodalime glass substrate using PECVD methods. This study was the effort to find the correlation between pretreatment with plasma and <112>-preferred orientation of TiO 2 thin films. The PECVD methods were used at the relatively low substrate temperature of the range from 250° to 412° in order to avoid Na + diffusion from the soda-lime glass substrate into TiO 2 layer during deposition. Plasma pretreatment drives soda-lime glass to have high roughness and high surface energy because its contribution to a shift in Si-O- (non-bridging) due to sodium ion depletion at the soda-lime glass surface. And that results are confirmed through the investigation of AFM and contact angle measurement. Pretreatment with plasma was used for changing the surface characteristics of soda lime soda-lime glass to fabricate <112>-preferred orientation of TiO 2 thin films. The facet of the <112>-oriented film consists of {100} and {004} facet planes. {100} facet planes are so unstable that they have the high surface energy because they show no interrupted chain of strong bond, in crystalline TiO 2. <112>-oriented film consisted of {100} facet planes with high surface energy will prefer to be deposited on the unstable substrate with high surface energy better than on the stable substrate. The XRD and SEM results showed TiO 2 thin films deposited on the soda-lime glass pretreated with plasma have a preference of <112>-orientation. Finally, plasma pretreatment drove TiO 2 thin films to have <112>-preferred orientation through improving the surface of soda-lime glass.

AB - TiO 2 has environmental application due to its unique photoinduced properties such as antibacterial and superhydrophilic functions, It is reported that crystalline structure and orientation of TiO 2 thin film affect photocatalytic efficiency. And our previous study showed that <112>-preferred orientation TiO 2 film resulted in the better photocatalytic efficiency. <112>-oriented TiO 2 thin films were fabricated on sodalime glass substrate using PECVD methods. This study was the effort to find the correlation between pretreatment with plasma and <112>-preferred orientation of TiO 2 thin films. The PECVD methods were used at the relatively low substrate temperature of the range from 250° to 412° in order to avoid Na + diffusion from the soda-lime glass substrate into TiO 2 layer during deposition. Plasma pretreatment drives soda-lime glass to have high roughness and high surface energy because its contribution to a shift in Si-O- (non-bridging) due to sodium ion depletion at the soda-lime glass surface. And that results are confirmed through the investigation of AFM and contact angle measurement. Pretreatment with plasma was used for changing the surface characteristics of soda lime soda-lime glass to fabricate <112>-preferred orientation of TiO 2 thin films. The facet of the <112>-oriented film consists of {100} and {004} facet planes. {100} facet planes are so unstable that they have the high surface energy because they show no interrupted chain of strong bond, in crystalline TiO 2. <112>-oriented film consisted of {100} facet planes with high surface energy will prefer to be deposited on the unstable substrate with high surface energy better than on the stable substrate. The XRD and SEM results showed TiO 2 thin films deposited on the soda-lime glass pretreated with plasma have a preference of <112>-orientation. Finally, plasma pretreatment drove TiO 2 thin films to have <112>-preferred orientation through improving the surface of soda-lime glass.

UR - http://www.scopus.com/inward/record.url?scp=0141962591&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0141962591&partnerID=8YFLogxK

M3 - Conference contribution

SP - 290

BT - IEEE International Conference on Plasma Science

ER -