Effect of plasma treatment on the gas sensor with single-walled carbon nanotube paste

Ki Young Dong, Dae Jin Ham, Byung Hyun Kang, Keunsoo Lee, Jinnil Choi, Jin Woo Lee, Hyang Hee Choi, Byeong Kwon Ju

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)

Abstract

The effect of plasma treatment on the gas sensing properties of screen-printed single-walled carbon nanotube (SWCNT) pastes is reported. The gas sensors, using SWCNT pastes as a sensing material, were fabricated by photolithography and screen printing. The SWCNT pastes were deposited between interdigitated electrodes on heater membrane by screen printing. In order to functionalize the pastes, they were plasma treated using several gases which produce defects caused by reactive ion etching. The Ar and O2 plasma-treated SWCNT pastes exhibited a large response to NO2 exposure and the fluorinated gas, such as CF4 and SF6, plasma-treated SWCNT pastes exhibited a large response to NH3 exposure.

Original languageEnglish
Pages (from-to)33-37
Number of pages5
JournalTalanta
Volume89
DOIs
Publication statusPublished - 2012 Jan 30

Keywords

  • Carbon nanotube
  • Gas sensors
  • Plasma treatment
  • Screen printing

ASJC Scopus subject areas

  • Analytical Chemistry

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