Effect of substrate temperature on residual stress of ZnO thin films prepared by ion beam deposition

Engineering & Materials Science

• Ion beams 100%
• Thin films 66%
• Residual stresses 61%
• Substrates 49%
• Structural properties 38%
• Sapphire 31%
• Temperature 28%
• X ray diffraction 23%
• Field emission 15%
• Atomic force microscopy 14%
• Surface morphology 13%
• Surface roughness 9%
• Scanning electron microscopy 9%
• Tuning 9%

Chemical Compounds

• Residual Stress 93%
• Ion Beam 77%
• Deposition Technique 25%
• Atomic Force Microscopy 18%
• X-Ray Diffraction 11%
• Surface 7%