Effect of the N2/(Ar+N2) flow ratio on the synthesis of zirconium nitride thin films by DC reactive sputtering

Dong Ho Kim, Chul Min Kim, Eun Hong Kim, Young Chul Shin, Tae Geun Kim, Cheong Hyun Roh, Cheol Koo Hahn

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


We investigate the effect of the N2/(Ar+N2) flow ratio (F(N2)) on the structural and the electrical properties of ZrNx thin films deposited on Si(111) substrates by DC reactive sputtering at room temperature (R.T.), by using glancing-angle X-ray diffraction (GA-XRD), scanning electron microscopy (SEM), and atomic force microscopy (AFM). The films show stoichiometric ZrN structures for F(N2) from 4.3% to 10% and changed into non-stoichiometric Zr3N4 structures with increasing F(N2) from 11.8% to 25%. On the other hand, the electrical resistivity rapidly increase from 40.8 μ·cm to 1291.87 μ·cm with increasing F(N2), which may be related to compositional changes from ZrN to Zr3N4. We also observed that the stoichiometric ZrN film had larger and denser granular-type grains because of it had a higher growth rate of grains than the non-stoichiometric Zr3N4 film.

Original languageEnglish
Pages (from-to)1149-1152
Number of pages4
JournalJournal of the Korean Physical Society
Issue number3
Publication statusPublished - 2009 Sep


  • DC reactive sputtering
  • Grain growth
  • Stoichiometry
  • Zirconium nitride (ZrN)

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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