Effect of the porosity of PZT thick films on mass sensitivity and resonance force for cantilever type bio sensors

Jae Hong Park, Tae Yun Kwon, Dae Sung Yoon, Tae Song Kim, Hwan Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

PZT thick films fabricated through the screen printing show a porosity ranging from 20% to 40%. Unfortunately, these high porosities of thick films greatly affect electromechanical characteristics of PZT thick film cantilevers. In this paper, we report a systematic analysis regarding the effect of the thick film porosity on the electromechanical characteristics of the PZT thick film cantilever. PZT (Pb(Zr0.52Ti0.48)O3) thick film cantilever devices were successfully fabricated on a Pt/TiO2/ SiNX/Si substrate using a screen printing method and MEMS processes. Theoretical calculations of mass sensitivity and actuating force of PZT thick film cantilevers are presented with respect to material properties (density and Young's modulus) and geometry (length, width, and thickness of PZT thick films, which are dependent on experimentally verified material and geometrical parameters. From the result of modeling, it is confirmed that the increase of Young's modulus due to the decrease of porosity of PZT thick films is more efficient than the control of the cantilever geometry, for increasing the cantilever resonating force. On the other hand, the optimization of geometric constituents is more effective than the control of densification of PZT thick films, for increasing the cantilever sensitivity.

Original languageEnglish
Title of host publication2006 5th IEEE Conference on Sensors
Pages1219-1222
Number of pages4
DOIs
Publication statusPublished - 2006
Externally publishedYes
Event2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of
Duration: 2006 Oct 222006 Oct 25

Publication series

NameProceedings of IEEE Sensors

Other

Other2006 5th IEEE Conference on Sensors
CountryKorea, Republic of
CityDaegu
Period06/10/2206/10/25

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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