Effects of DC & AC bias on the dynamic performance of micro resonators

Francis E H Tay, R. Kumaran, Beelee Chua, V. J. Logeeswaran

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

It has been observed in many MEMS devices that there is a shift in resonant frequency due to voltage bias. The voltage bias may include either AC or DC bias or both. This paper reports on the significant discrepancy between the analytical and experimental resonant frequencies of folded beam micro resonators. Experimental results for the resonant frequency showed a consistent 20% discrepancy over theoretical and finite element results for MUMPs fabricated resonators. This difference in frequency is also seen in SOI fabricated devices. Possible causes of the discrepancy from tapered cross section of the flexure beams, dimensional variations and electrostatic spring effects are discussed and shown to contribute to the significant difference between analytical and experimental values. IntelliCAD TM electrostatic simulation was done to isolate the electrostatic spring effect and compared with the experimental observations. The compliance due to AC voltage has also been observed in SOI and MUMPs resonators and has been presented.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSPIE
Pages456-461
Number of pages6
Volume4019
Publication statusPublished - 2000
Externally publishedYes
EventDesign, Test, Integration, and Packaging of MEMS/MOEMS - Paris, Fr
Duration: 2000 May 92000 May 11

Other

OtherDesign, Test, Integration, and Packaging of MEMS/MOEMS
CityParis, Fr
Period00/5/900/5/11

Fingerprint

resonant frequencies
Resonators
Electrostatics
Natural frequencies
alternating current
direct current
resonators
SOI (semiconductors)
electrostatics
Bias voltage
electric potential
flexing
microelectromechanical systems
MEMS
causes
shift
cross sections
Electric potential
simulation
Compliance

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Tay, F. E. H., Kumaran, R., Chua, B., & Logeeswaran, V. J. (2000). Effects of DC & AC bias on the dynamic performance of micro resonators. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4019, pp. 456-461). SPIE.

Effects of DC & AC bias on the dynamic performance of micro resonators. / Tay, Francis E H; Kumaran, R.; Chua, Beelee; Logeeswaran, V. J.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4019 SPIE, 2000. p. 456-461.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tay, FEH, Kumaran, R, Chua, B & Logeeswaran, VJ 2000, Effects of DC & AC bias on the dynamic performance of micro resonators. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 4019, SPIE, pp. 456-461, Design, Test, Integration, and Packaging of MEMS/MOEMS, Paris, Fr, 00/5/9.
Tay FEH, Kumaran R, Chua B, Logeeswaran VJ. Effects of DC & AC bias on the dynamic performance of micro resonators. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4019. SPIE. 2000. p. 456-461
Tay, Francis E H ; Kumaran, R. ; Chua, Beelee ; Logeeswaran, V. J. / Effects of DC & AC bias on the dynamic performance of micro resonators. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4019 SPIE, 2000. pp. 456-461
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