Effects of deposition temperatures and annealing conditions on the microstructural, electrical and optical properties of polycrystalline Al-doped ZnO thin films

Joon Ho Oh, Kyoung Kook Kim, Tae Yeon Seong

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

Al-doped ZnO (AZO, ZnO:Al2O3 = 98:2 wt%) films are deposited on different substrates by an RF magnetron sputtering and subsequently annealed at three different conditions to investigate the microstructural, electrical, and optical properties. X-ray diffraction and scanning electron microscope results show that all the samples are polycrystalline and the samples rapid-thermal-annealed at 900 °C in an N2 ambient contain larger grains compared to the furnace-annealed samples. It is shown that the sample deposited at room temperature on the sapphire gives a resistivity of 5.57 × 10-4 Ω cm when furnace-annealed at 500 °C in a mixture of N2:H2 (9:1). It is also shown that the Hall mobility vs. carrier concentration (μ-n) relation is divided into two groups, depending on the annealing conditions, namely, either rapid-thermal annealing or furnace annealing. The relations are described in terms of either grain boundary scattering or ionized impurity scattering mechanism. In addition, the samples produce fairly high transmittance of 91-96.99% across the wavelength region of 400-1100 nm. The optical bandgaps of the samples increase with increasing carrier concentration.

Original languageEnglish
Pages (from-to)2731-2736
Number of pages6
JournalApplied Surface Science
Volume257
Issue number7
DOIs
Publication statusPublished - 2011 Jan 1

Fingerprint

Electric properties
Furnaces
Optical properties
Annealing
Thin films
Carrier concentration
Scattering
Hall mobility
Aluminum Oxide
Rapid thermal annealing
Optical band gaps
Sapphire
Magnetron sputtering
Temperature
Grain boundaries
Electron microscopes
Impurities
Scanning
X ray diffraction
Wavelength

Keywords

  • Al-doped ZnO film
  • Annealing condition
  • RF magnetron sputtering
  • Transparent conducting oxide

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

Cite this

Effects of deposition temperatures and annealing conditions on the microstructural, electrical and optical properties of polycrystalline Al-doped ZnO thin films. / Oh, Joon Ho; Kim, Kyoung Kook; Seong, Tae Yeon.

In: Applied Surface Science, Vol. 257, No. 7, 01.01.2011, p. 2731-2736.

Research output: Contribution to journalArticle

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AB - Al-doped ZnO (AZO, ZnO:Al2O3 = 98:2 wt%) films are deposited on different substrates by an RF magnetron sputtering and subsequently annealed at three different conditions to investigate the microstructural, electrical, and optical properties. X-ray diffraction and scanning electron microscope results show that all the samples are polycrystalline and the samples rapid-thermal-annealed at 900 °C in an N2 ambient contain larger grains compared to the furnace-annealed samples. It is shown that the sample deposited at room temperature on the sapphire gives a resistivity of 5.57 × 10-4 Ω cm when furnace-annealed at 500 °C in a mixture of N2:H2 (9:1). It is also shown that the Hall mobility vs. carrier concentration (μ-n) relation is divided into two groups, depending on the annealing conditions, namely, either rapid-thermal annealing or furnace annealing. The relations are described in terms of either grain boundary scattering or ionized impurity scattering mechanism. In addition, the samples produce fairly high transmittance of 91-96.99% across the wavelength region of 400-1100 nm. The optical bandgaps of the samples increase with increasing carrier concentration.

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