Effects of heating schedule and atmosphere on the phase formation of plzt thin films prepared using sol-gel process

Dae Sung Yoon, Jae Myung Kim, Ki Cheol Ahn, Kwangsoo No

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

Lead lanthanum zirconate titanate [PLZT(9/65/35)] thin films were fabricated by spin coating of the metallo-organic solutions onto ITO-coated Corning 7059 glass substrates and heat treated at 600°C for 2 hours with different heating schedules. Microstructure and perovskite phase content of the PLZT thin films were studied using X-ray diffraction analysis (XRD), optical microscope (OM) and scanning electron microscope (SEM). A typical microstructure of the PLZT(9/65/35) thin films prepared using sol-gel process consists of micrometer-scale (about 4–5 μm) circular perovskite grains surrounded nanometer-scale pyrochlore grains. Effects of heating schedule and atmosphere on the crystallization kinetics of the amorphous PLZT thin films were studied. Firing at higher heating rate increased the number of perovskite nuclei and decreased pyrochlore content in the films. Also, the film heat treated at higher heating rate had lower transmittance at visible light because the interface boundary and the grain boundary increased and acted as the light scattering source. The films heat treated in air and O2 atmosphere have relatively higher perovskite phase content than the film heat treated in Pb atmosphere.

Original languageEnglish
Pages (from-to)93-101
Number of pages9
JournalIntegrated Ferroelectrics
Volume4
Issue number1
DOIs
Publication statusPublished - 1994 Feb 1
Externally publishedYes

Fingerprint

sol-gel processes
schedules
Perovskite
Sol-gel process
Heating
atmospheres
Thin films
heat
heating
thin films
Heating rate
Lanthanum
microstructure
Microstructure
Crystallization kinetics
Spin coating
Amorphous films
ITO (semiconductors)
optical microscopes
lanthanum

Keywords

  • heating schedule
  • perovskite
  • PLZT
  • pyrochlore

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Effects of heating schedule and atmosphere on the phase formation of plzt thin films prepared using sol-gel process. / Yoon, Dae Sung; Kim, Jae Myung; Ahn, Ki Cheol; No, Kwangsoo.

In: Integrated Ferroelectrics, Vol. 4, No. 1, 01.02.1994, p. 93-101.

Research output: Contribution to journalArticle

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