Abstract
The impurity-induced layer disordering in B- or Si-implanted Ga0.8In0.2As/GaxIn1-xAs yP1-y/Ga0.51In0.49P /GaAs quantum well structure has been studied. The wavelength shift of the photoluminescence peak and the degree of intermixing can be determined by the type and energy of implanted ions with followed annealing at the temperature of 900°C. A photoluminescence peak shift of 70 meV was obtained by 120 keV Si-implantation and annealing at 900°C. The diffused interface was also studied by cross sectional transmission electron microscopy.
Original language | English |
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Pages (from-to) | L1364-L1366 |
Journal | Japanese Journal of Applied Physics, Part 2: Letters |
Volume | 36 |
Issue number | 10 SUPPL. B |
DOIs | |
Publication status | Published - 1997 Oct 15 |
Externally published | Yes |
Keywords
- Implantation
- Impurity-induced layer disordering (IILD)
- Quantum well
- Transmission electron microscopy (TEM)
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)