Effects of nitride-based plasma pretreatment prior to SiNx passivation in AlGaN/GaN high-electron-mobility transistors on silicon substrates

Ji Ha Kim, Hong Goo Choi, Min Woo Ha, Hong Joo Song, Cheong Hyun Roh, Jun Ho Lee, Jung Ho Park, Cheol Koo Hahn

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19 Citations (Scopus)

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