Effects of oxygen partial pressure on the electrical and optical properties of pulsed-laser-deposited sb-doped Sno 2 films

Hyun Gi Hong, June O. Song, Sang Ho Kim, Takhee Lee, Tae Yeon Seong

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

We have investigated the electrical and optical properties of pulsed-laser-deposited Sb-doped SnO 2 films (250 nm thick) as a function of the oxygen partial pressure. The SnO 2 films were grown on glass substrates using a SnO 2 target containing 5 atom % Sb. The distance between the substrate and the target was 7 cm and working pressure varied from 1.1 to 13.3 Pa. The target was ablated using KrF excimer laser with energy density of 3.75 J/cm 2. It is shown that the electrical and optical properties of the films grown at 480°C with 3000 pulses sensitively depend on the oxygen pressure. The electron concentration is maximum (5.6 × 10 20 cm -3) at 4 Pa, the electron mobility is maximum (8.5 cm 2 V -1 s -1) at 9.3 Pa, and the resistivity is minimum (2.5 × 10 -3 Ω cm) at 4 Pa. The transmittance is shown to depend on the oxygen pressures. X-ray diffraction results show that the crystalline quality of the films becomes improved with decreasing oxygen pressure. It is further shown that the sample grown at 1.1 Pa contains oxygen-deficient phases. The UV absorption edge of the films shifts toward the shorter wavelengths with decreasing oxygen pressure, which is attributed to Burstein-Moss shift.

Original languageEnglish
JournalJournal of the Electrochemical Society
Volume153
Issue number10
DOIs
Publication statusPublished - 2006 Sep 13

Fingerprint

Pulsed lasers
Partial pressure
partial pressure
pulsed lasers
Electric properties
Optical properties
electrical properties
Oxygen
optical properties
oxygen
Bryophytes
Electron mobility
shift
Excimer lasers
Substrates
electron mobility
excimer lasers
transmittance
flux density
Crystalline materials

ASJC Scopus subject areas

  • Electrochemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Effects of oxygen partial pressure on the electrical and optical properties of pulsed-laser-deposited sb-doped Sno 2 films. / Hong, Hyun Gi; Song, June O.; Kim, Sang Ho; Lee, Takhee; Seong, Tae Yeon.

In: Journal of the Electrochemical Society, Vol. 153, No. 10, 13.09.2006.

Research output: Contribution to journalArticle

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