Bi5Nb3O15 (B5N3) thin films grown at temperatures above 500 °C developed a crystalline B 5N3 phase that decomposed into a BiNbO4 phase in the film grown at 700 °C, probably due to Bi2O3 evaporation. The leakage current density of the B5N3 film grown at 200 °C under an oxygen pressure (OP) of 100 mTorr was high at approximately 6.3 × 10-7 A cm-2 at 0.2 MV cm -1, with a small breakdown field of 0.24 MV cm-1 due to the presence of intrinsic oxygen vacancies. The electrical properties of the B5N3 films improved with increasing OP during the growth but the dielectric constant (εr) decreased. The Mn-doping also improved the electrical properties of the B5N3 films grown under low OP by producing doubly ionized oxygen vacancies, which decreased the number of the intrinsic oxygen vacancies. Furthermore, the Mn-doping increased the εr value of the B5N3 film, confirming the effectiveness of such doping in improving both the electrical and the dielectric properties of the B5N3 film. In particular, the 5.0 mol% Mn-doped B5N3 film grown at 200 °C under an OP of 100 mTorr exhibited a low leakage current density of 7.9 × 10 -8 A cm-2 at 0.2 MV cm-1 and a large breakdown field of 0.4 MV cm-1 with a high εr of 64.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Acoustics and Ultrasonics
- Surfaces, Coatings and Films