Effects of plasma enhanced chemical vapor deposition radio frequency on the properties of SiNx:H films

Kyung Dong Lee, Kwang Sun Ji, Soohyun Bae, Seongtak Kim, Hyunho Kim, Jae Eun Kim, Yoon Chung Nam, Sungjin Choi, Myeong Sang Jeong, Min Gu Kang, Hee Eun Song, Yoonmook Kang, Hae Seok Lee, Donghwan Kim

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Physics & Astronomy

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Chemical Compounds

Medicine & Life Sciences