Effects of Pre-annealing on Firing Stability of Atomic Layer-Deposited Al2O3

Soohyun Bae, Soo Min Kim, Kyung Dong Lee, Young Do Kim, Sungeun Park, Yoon Mook Kang, Haeseok Lee, Donghwan Kim

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

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Chemical Compounds