Effects of rapid thermal annealing on the electrical properties of heavily carbon-doped InGaAs

Chang Sik Son, Seong Il Kim, Tae Geun Kim, Yong Kim, Moo Sung Kim, Suk Ki Min

Research output: Contribution to journalArticle

Abstract

The effects of rapid thermal annealing (RTA) on the electrical properties of carbon-doped InGaAs epilayers have been analyzed by the Van der Pauw-Hall measurement. After RTA, the highest hole concentration of 3.3 × 1020 cm-3 at In0.09Ga0.91As epilayer was obtained. RTA processes cause the inactivated carbon atoms to be active by breaking C-H or C-Hx bonds in the epilayers. This leads to the increase of the hole concentration. Below the InAs mole fraction of 0.35, we have obtained the maximum activation efficiency of the carbon atoms at the RTA temperature of 650°C. The activation efficiency decreased with increasing InAs mole fraction. The type conversion from p-type to n-type took place after RTA at the InAs mole fraction of 0.44, while it occurred at that of 0.48 in the as-grown. The reason for the shift of the type conversion to the lower value after RTA would be due to the outdiffusion of In atoms in the InGaAs epilayer, and the activated carbon atoms would more effectively enter into In sites than As sites due to the outdiffusion of In atoms.

Original languageEnglish
Pages (from-to)475-478
Number of pages4
JournalSolid State Communications
Volume98
Issue number5
DOIs
Publication statusPublished - 1996 May 1
Externally publishedYes

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Rapid thermal annealing
Electric properties
Carbon
Epilayers
electrical properties
annealing
carbon
Atoms
Hole concentration
atoms
Chemical activation
activation
activated carbon
Activated carbon
causes
shift
indium arsenide

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Effects of rapid thermal annealing on the electrical properties of heavily carbon-doped InGaAs. / Son, Chang Sik; Kim, Seong Il; Kim, Tae Geun; Kim, Yong; Kim, Moo Sung; Min, Suk Ki.

In: Solid State Communications, Vol. 98, No. 5, 01.05.1996, p. 475-478.

Research output: Contribution to journalArticle

Son, Chang Sik ; Kim, Seong Il ; Kim, Tae Geun ; Kim, Yong ; Kim, Moo Sung ; Min, Suk Ki. / Effects of rapid thermal annealing on the electrical properties of heavily carbon-doped InGaAs. In: Solid State Communications. 1996 ; Vol. 98, No. 5. pp. 475-478.
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