Effects of sputtering pressure on the characteristics of lithium ion conductive lithium phosphorous oxynitride thin film

Ho Young Park, Sang Cheol Nam, Young Chang Lim, Kyu Gil Choi, Ki Chang Lee, Gi Back Park, Seong Rae Lee, Heesook Park Kim, Sung Baek Cho

Research output: Contribution to journalArticle

42 Citations (Scopus)


Lithium phosphorous oxynitride(Lipon) thin films as a lithium ion conductive electrolyte were prepared by radio frequency reactive sputtering in N2 plasma. The properties of the amorphous Lipon solid electrolyte were investigated as a function of N2 pressure during reactive sputtering. The ionic conductivity and the electrochemical stability of Lipon thin films improved drastically as the N2 pressure decreased. The ionic conductivity closed to 10-6 S cm-1 and obtained a stability window of 1.0-5.0 V with an N2 pressure of 5 mTorr, where the number of nitrogen bonds between the phosphate groups were more than those formed at higher pressure. It was possible to fabricate the Li//LiCoO 2 complete thin film battery using this Lipon solid electrolyte, which exhibited excellent discharge characteristics close to the theoretical capacity (ca. 69 uAhcm-2-um-1) and showed a considerably high rate capability.

Original languageEnglish
Pages (from-to)1023-1030
Number of pages8
JournalJournal of Electroceramics
Issue number2-4
Publication statusPublished - 2006 Dec 1



  • Lipon
  • Nitrogen pressure
  • Solid electrolyte
  • Sputtering
  • Thin film battery

ASJC Scopus subject areas

  • Ceramics and Composites

Cite this