Effects of Substrate and Bottom Electrodes on the Phase Formation of Lead Zirconate Titanate Thin Films Prepared by the Sol-Gel Method

Chang Kim Jung, Dae Sung Yoon, Joon Lee Sung, Chaun Gi Choi, Kwangsoo No

Research output: Contribution to journalArticle

31 Citations (Scopus)

Abstract

Lead zirconate titanate (PZT) thin films were fabricated using sol-gel spinning onto Pt/glass, Pt/Ti/glass and Pt/Ti/SiO2/Si substrates and heat-treated using rapid thermal annealing (RTA). The preferred orientation and the perovskite phase content of the PZT thin films were studied using X-ray diffraction analysis (XRD), and the polarization vs electric field (P-E) hysteresis characteristics were investigated using a standardized ferroelectric test system. All of the resulting films on platinized substrate with Ti adhesion layer were well crystallized with the perovskite phase. A preferred (111) orientation was obtained on the Pt/Ti/glass substrate. The saturation polarization of the PZT film on glass substrates was higher than that on Si substrates.

Original languageEnglish
Number of pages1
JournalJapanese Journal of Applied Physics
Volume33
Issue number5R
DOIs
Publication statusPublished - 1994 Jan 1
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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