Effects of substrate temperature on the electrical and the optical properties of n-type ZnO/p-type 4H-SiC

Ji Chul Jung, Ji Hong Kim, Kang Min Do, Byung-Moo Moon, Sung Jae Joo, Wook Bahng, Sang Cheol Kim, Nam Kyun Kim, Sang Mo Koo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We investigated the effect of the substrate temperature on the electrical and the optical properties of ZnO/4H-SiC structures. The n-type ZnO layer was grown on p-type 4H-SiC substrate by pulsed laser deposition to form p-n hetero-junction diode structure. The n-type ZnO thin films were deposited by pulsed laser deposition at different temperatures of 200, 400, and 600 °C, respectively. It was shown from transmission line method (TLM) and auger electron spectroscopy (AES) data that the sheet resistance of ZnO on SiC was increased from ∼760 Ω/square to ∼4000 Ω/square as the deposition temperature increases and the oxygen outdiffusion decreases. The I-V characteristics with and without illumination have also been studied.

Original languageEnglish
Title of host publicationMaterials Science Forum
Pages1327-1330
Number of pages4
Volume717-720
DOIs
Publication statusPublished - 2012 May 28
Event14th International Conference on Silicon Carbide and Related Materials 2011, ICSCRM 2011 - Cleveland, OH, United States
Duration: 2011 Sep 112011 Sep 16

Publication series

NameMaterials Science Forum
Volume717-720
ISSN (Print)02555476

Other

Other14th International Conference on Silicon Carbide and Related Materials 2011, ICSCRM 2011
CountryUnited States
CityCleveland, OH
Period11/9/1111/9/16

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Keywords

  • N-type ZnO
  • P-type 4H-SiC
  • Substrate temperature

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Jung, J. C., Kim, J. H., Do, K. M., Moon, B-M., Joo, S. J., Bahng, W., ... Koo, S. M. (2012). Effects of substrate temperature on the electrical and the optical properties of n-type ZnO/p-type 4H-SiC. In Materials Science Forum (Vol. 717-720, pp. 1327-1330). (Materials Science Forum; Vol. 717-720). https://doi.org/10.4028/www.scientific.net/MSF.717-720.1327