Effects of substrate temperature on the electrical and the optical properties of n-type ZnO/p-type 4H-SiC

Ji Chul Jung, Ji Hong Kim, Kang Min Do, Byung-Moo Moon, Sung Jae Joo, Wook Bahng, Sang Cheol Kim, Nam Kyun Kim, Sang Mo Koo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We investigated the effect of the substrate temperature on the electrical and the optical properties of ZnO/4H-SiC structures. The n-type ZnO layer was grown on p-type 4H-SiC substrate by pulsed laser deposition to form p-n hetero-junction diode structure. The n-type ZnO thin films were deposited by pulsed laser deposition at different temperatures of 200, 400, and 600 °C, respectively. It was shown from transmission line method (TLM) and auger electron spectroscopy (AES) data that the sheet resistance of ZnO on SiC was increased from ∼760 Ω/square to ∼4000 Ω/square as the deposition temperature increases and the oxygen outdiffusion decreases. The I-V characteristics with and without illumination have also been studied.

Original languageEnglish
Title of host publicationMaterials Science Forum
Pages1327-1330
Number of pages4
Volume717-720
DOIs
Publication statusPublished - 2012 May 28
Event14th International Conference on Silicon Carbide and Related Materials 2011, ICSCRM 2011 - Cleveland, OH, United States
Duration: 2011 Sep 112011 Sep 16

Publication series

NameMaterials Science Forum
Volume717-720
ISSN (Print)02555476

Other

Other14th International Conference on Silicon Carbide and Related Materials 2011, ICSCRM 2011
CountryUnited States
CityCleveland, OH
Period11/9/1111/9/16

Fingerprint

Optical properties
Pulsed laser deposition
optical properties
pulsed laser deposition
Substrates
junction diodes
Sheet resistance
Auger electron spectroscopy
p-n junctions
Temperature
Auger spectroscopy
transmission lines
temperature
electron spectroscopy
Electric lines
Diodes
Lighting
illumination
Oxygen
Thin films

Keywords

  • N-type ZnO
  • P-type 4H-SiC
  • Substrate temperature

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Jung, J. C., Kim, J. H., Do, K. M., Moon, B-M., Joo, S. J., Bahng, W., ... Koo, S. M. (2012). Effects of substrate temperature on the electrical and the optical properties of n-type ZnO/p-type 4H-SiC. In Materials Science Forum (Vol. 717-720, pp. 1327-1330). (Materials Science Forum; Vol. 717-720). https://doi.org/10.4028/www.scientific.net/MSF.717-720.1327

Effects of substrate temperature on the electrical and the optical properties of n-type ZnO/p-type 4H-SiC. / Jung, Ji Chul; Kim, Ji Hong; Do, Kang Min; Moon, Byung-Moo; Joo, Sung Jae; Bahng, Wook; Kim, Sang Cheol; Kim, Nam Kyun; Koo, Sang Mo.

Materials Science Forum. Vol. 717-720 2012. p. 1327-1330 (Materials Science Forum; Vol. 717-720).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Jung, JC, Kim, JH, Do, KM, Moon, B-M, Joo, SJ, Bahng, W, Kim, SC, Kim, NK & Koo, SM 2012, Effects of substrate temperature on the electrical and the optical properties of n-type ZnO/p-type 4H-SiC. in Materials Science Forum. vol. 717-720, Materials Science Forum, vol. 717-720, pp. 1327-1330, 14th International Conference on Silicon Carbide and Related Materials 2011, ICSCRM 2011, Cleveland, OH, United States, 11/9/11. https://doi.org/10.4028/www.scientific.net/MSF.717-720.1327
Jung JC, Kim JH, Do KM, Moon B-M, Joo SJ, Bahng W et al. Effects of substrate temperature on the electrical and the optical properties of n-type ZnO/p-type 4H-SiC. In Materials Science Forum. Vol. 717-720. 2012. p. 1327-1330. (Materials Science Forum). https://doi.org/10.4028/www.scientific.net/MSF.717-720.1327
Jung, Ji Chul ; Kim, Ji Hong ; Do, Kang Min ; Moon, Byung-Moo ; Joo, Sung Jae ; Bahng, Wook ; Kim, Sang Cheol ; Kim, Nam Kyun ; Koo, Sang Mo. / Effects of substrate temperature on the electrical and the optical properties of n-type ZnO/p-type 4H-SiC. Materials Science Forum. Vol. 717-720 2012. pp. 1327-1330 (Materials Science Forum).
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