Effects of substrate treatment on the initial growth mode of indium-tin-oxide films

Younggun Han, Donghwan Kim, Jun Sik Cho, Young Whan Beag, Seok Keun Koh, Vladimir S. Chernysh

Research output: Contribution to journalArticle

29 Citations (Scopus)

Abstract

The initial growth mode of indium tin oxide (ITO) on polycarbonate (PC) substrates was investigated. Some of the PC substrates were bombarded by 1-keV Ar ions in an oxygen environment to modify the substrate surface before ITO sputter deposition. The initial part of the film growth was transformed from a three-dimensional island growth to a two-dimensional like growth as a result of the surface treatment. The change of the growth mode was attributed to oxygen-bound functional groups newly formed on the PC surface. Models based on thermodynamic theory and on atomic kinetic approach are presented to explain the transition, respectively.

Original languageEnglish
Article number024910
JournalJournal of Applied Physics
Volume97
Issue number2
DOIs
Publication statusPublished - 2005 Jan 15

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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