Effects of substrate treatment on the initial growth mode of indium-tin-oxide films

Younggun Han; Donghwan Kim; Jun Sik Cho; Young Whan Beag; Seok Keun Koh; Vladimir S. Chernysh

doi:10.1063/1.1835003

Effects of substrate treatment on the initial growth mode of indium-tin-oxide films

Younggun Han, Donghwan Kim, Jun Sik Cho, Young Whan Beag, Seok Keun Koh, Vladimir S. Chernysh

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

30 Citations (Scopus)

Abstract

The initial growth mode of indium tin oxide (ITO) on polycarbonate (PC) substrates was investigated. Some of the PC substrates were bombarded by 1-keV Ar ions in an oxygen environment to modify the substrate surface before ITO sputter deposition. The initial part of the film growth was transformed from a three-dimensional island growth to a two-dimensional like growth as a result of the surface treatment. The change of the growth mode was attributed to oxygen-bound functional groups newly formed on the PC surface. Models based on thermodynamic theory and on atomic kinetic approach are presented to explain the transition, respectively.

Original language	English
Article number	024910
Journal	Journal of Applied Physics
Volume	97
Issue number	2
DOIs	https://doi.org/10.1063/1.1835003
Publication status	Published - 2005 Jan 15

ASJC Scopus subject areas

Physics and Astronomy(all)

Access to Document

10.1063/1.1835003

Cite this

@article{a565a0430636479fad9e19f9f9a35bb2,

title = "Effects of substrate treatment on the initial growth mode of indium-tin-oxide films",

abstract = "The initial growth mode of indium tin oxide (ITO) on polycarbonate (PC) substrates was investigated. Some of the PC substrates were bombarded by 1-keV Ar ions in an oxygen environment to modify the substrate surface before ITO sputter deposition. The initial part of the film growth was transformed from a three-dimensional island growth to a two-dimensional like growth as a result of the surface treatment. The change of the growth mode was attributed to oxygen-bound functional groups newly formed on the PC surface. Models based on thermodynamic theory and on atomic kinetic approach are presented to explain the transition, respectively.",

author = "Younggun Han and Donghwan Kim and Cho, {Jun Sik} and Beag, {Young Whan} and Koh, {Seok Keun} and Chernysh, {Vladimir S.}",

note = "Funding Information: This work was supported by the Korea Science and Engineering Foundation (R01-2001-000002800).",

year = "2005",

month = jan,

day = "15",

doi = "10.1063/1.1835003",

language = "English",

volume = "97",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

number = "2",

}

TY - JOUR

T1 - Effects of substrate treatment on the initial growth mode of indium-tin-oxide films

AU - Han, Younggun

AU - Kim, Donghwan

AU - Cho, Jun Sik

AU - Beag, Young Whan

AU - Koh, Seok Keun

AU - Chernysh, Vladimir S.

N1 - Funding Information: This work was supported by the Korea Science and Engineering Foundation (R01-2001-000002800).

PY - 2005/1/15

Y1 - 2005/1/15

N2 - The initial growth mode of indium tin oxide (ITO) on polycarbonate (PC) substrates was investigated. Some of the PC substrates were bombarded by 1-keV Ar ions in an oxygen environment to modify the substrate surface before ITO sputter deposition. The initial part of the film growth was transformed from a three-dimensional island growth to a two-dimensional like growth as a result of the surface treatment. The change of the growth mode was attributed to oxygen-bound functional groups newly formed on the PC surface. Models based on thermodynamic theory and on atomic kinetic approach are presented to explain the transition, respectively.

AB - The initial growth mode of indium tin oxide (ITO) on polycarbonate (PC) substrates was investigated. Some of the PC substrates were bombarded by 1-keV Ar ions in an oxygen environment to modify the substrate surface before ITO sputter deposition. The initial part of the film growth was transformed from a three-dimensional island growth to a two-dimensional like growth as a result of the surface treatment. The change of the growth mode was attributed to oxygen-bound functional groups newly formed on the PC surface. Models based on thermodynamic theory and on atomic kinetic approach are presented to explain the transition, respectively.

UR - http://www.scopus.com/inward/record.url?scp=19944430326&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=19944430326&partnerID=8YFLogxK

U2 - 10.1063/1.1835003

DO - 10.1063/1.1835003

M3 - Article

AN - SCOPUS:19944430326

VL - 97

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 2

M1 - 024910

ER -

Effects of substrate treatment on the initial growth mode of indium-tin-oxide films

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this