Abstract
The initial growth mode of indium tin oxide (ITO) on polycarbonate (PC) substrates was investigated. Some of the PC substrates were bombarded by 1-keV Ar ions in an oxygen environment to modify the substrate surface before ITO sputter deposition. The initial part of the film growth was transformed from a three-dimensional island growth to a two-dimensional like growth as a result of the surface treatment. The change of the growth mode was attributed to oxygen-bound functional groups newly formed on the PC surface. Models based on thermodynamic theory and on atomic kinetic approach are presented to explain the transition, respectively.
| Original language | English |
|---|---|
| Article number | 024910 |
| Journal | Journal of Applied Physics |
| Volume | 97 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2005 Jan 15 |
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ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
- Physics and Astronomy(all)
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Effects of substrate treatment on the initial growth mode of indium-tin-oxide films. / Han, Younggun; Kim, Donghwan; Cho, Jun Sik; Beag, Young Whan; Koh, Seok Keun; Chernysh, Vladimir S.
In: Journal of Applied Physics, Vol. 97, No. 2, 024910, 15.01.2005.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Effects of substrate treatment on the initial growth mode of indium-tin-oxide films
AU - Han, Younggun
AU - Kim, Donghwan
AU - Cho, Jun Sik
AU - Beag, Young Whan
AU - Koh, Seok Keun
AU - Chernysh, Vladimir S.
PY - 2005/1/15
Y1 - 2005/1/15
N2 - The initial growth mode of indium tin oxide (ITO) on polycarbonate (PC) substrates was investigated. Some of the PC substrates were bombarded by 1-keV Ar ions in an oxygen environment to modify the substrate surface before ITO sputter deposition. The initial part of the film growth was transformed from a three-dimensional island growth to a two-dimensional like growth as a result of the surface treatment. The change of the growth mode was attributed to oxygen-bound functional groups newly formed on the PC surface. Models based on thermodynamic theory and on atomic kinetic approach are presented to explain the transition, respectively.
AB - The initial growth mode of indium tin oxide (ITO) on polycarbonate (PC) substrates was investigated. Some of the PC substrates were bombarded by 1-keV Ar ions in an oxygen environment to modify the substrate surface before ITO sputter deposition. The initial part of the film growth was transformed from a three-dimensional island growth to a two-dimensional like growth as a result of the surface treatment. The change of the growth mode was attributed to oxygen-bound functional groups newly formed on the PC surface. Models based on thermodynamic theory and on atomic kinetic approach are presented to explain the transition, respectively.
UR - http://www.scopus.com/inward/record.url?scp=19944430326&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=19944430326&partnerID=8YFLogxK
U2 - 10.1063/1.1835003
DO - 10.1063/1.1835003
M3 - Article
AN - SCOPUS:19944430326
VL - 97
JO - Journal of Applied Physics
JF - Journal of Applied Physics
SN - 0021-8979
IS - 2
M1 - 024910
ER -