Effects of substrate treatment on the initial growth mode of indium-tin-oxide films

Younggun Han; Donghwan Kim; Jun Sik Cho; Young Whan Beag; Seok Keun Koh; Vladimir S. Chernysh

doi:10.1063/1.1835003

Effects of substrate treatment on the initial growth mode of indium-tin-oxide films

Younggun Han, Donghwan Kim, Jun Sik Cho, Young Whan Beag, Seok Keun Koh, Vladimir S. Chernysh

Department of Materials Science and Engineering

Research output: Contribution to journal › Article

29 Citations (Scopus)

Abstract

The initial growth mode of indium tin oxide (ITO) on polycarbonate (PC) substrates was investigated. Some of the PC substrates were bombarded by 1-keV Ar ions in an oxygen environment to modify the substrate surface before ITO sputter deposition. The initial part of the film growth was transformed from a three-dimensional island growth to a two-dimensional like growth as a result of the surface treatment. The change of the growth mode was attributed to oxygen-bound functional groups newly formed on the PC surface. Models based on thermodynamic theory and on atomic kinetic approach are presented to explain the transition, respectively.

Original language	English
Article number	024910
Journal	Journal of Applied Physics
Volume	97
Issue number	2
DOIs	https://doi.org/10.1063/1.1835003
Publication status	Published - 2005 Jan 15

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)
Physics and Astronomy(all)

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Han, Y., Kim, D., Cho, J. S., Beag, Y. W., Koh, S. K., & Chernysh, V. S. (2005). Effects of substrate treatment on the initial growth mode of indium-tin-oxide films. Journal of Applied Physics, 97(2), [024910]. https://doi.org/10.1063/1.1835003

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