Effects of temperature on ZnO hybrids grown by metal-organic chemical vapor deposition

A. Young Kim, Samseok Jang, Do Han Lee, So Young Yim, Dong Jin Byun

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The growth of three-dimensional ZnO hybrid structures by metal-organic chemical vapor deposition was controlled through their growth pressure and temperature. Vertically aligned ZnO nanorods were grown on c-plane of sapphire substrate at 600 °C and 400 Torr. ZnO film was then formed in situ on the ZnO nanorods at 100, 600, and 700 °C and 10 Torr. High-resolution X-ray diffraction measurements showed that the ZnO film on the nanorods/sapphire grew epitaxially, and that the ZnO film/nanorods hybrid structures had well-ordered wurtzite structures. The hybrid ZnO structure was shown to be about 3-5 μm by field-emission scanning electron microscopy. The hybrid formed at 600 °C showed better crystalline quality those formed at 100 °C or 700 °C. These structures have potential applicability as nanobuilding blocks in nanodevices.

Original languageEnglish
Pages (from-to)2888-2890
Number of pages3
JournalMaterials Research Bulletin
Volume47
Issue number10
DOIs
Publication statusPublished - 2012 Oct 1

    Fingerprint

Keywords

  • A. Nanostructures
  • A. Oxides
  • A. Thin films
  • B. Epitaxial growth
  • B. Vapor deposition

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this