Effects of the phosphorus doping level and excess silicon on the oxidation of tungsten polycide

Hoi Hwan Chung, Jong Hyun Lee, Byeong Kwon Ju, Young Cho Kim, Kwan Soo Chung

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Effects of the phosphorus doping level and excess silicon on the oxidation of tungsten polycide'. Together they form a unique fingerprint.

Physics & Astronomy