Effects of ZnO addition on electrical and structural properties of amorphous SnO2 thin films

J. H. Ko, I. H. Kim, D. Kim, K. S. Lee, T. S. Lee, J. H. Jeong, B. Cheong, Y. J. Baik, W. M. Kim

Research output: Contribution to journalArticle

37 Citations (Scopus)

Abstract

Amorphous Zn-Sn-O (ZTO) thin films with relative Zn contents (= [at.% Zn]/([at.% Zn] + [at.% Sn])) of 0, 0.08 and 0.27 were fabricated by co-sputtering of SnO2 and ZnO targets at room temperature. Changes in structural, electrical and optical properties together with electron transport properties were examined upon post-annealing treatment in the temperature range from 200 to 600 °C in vacuum and in air. Characterization by XRD showed that an amorphous ZTO thin film crystallized at higher temperatures with increasing Zn content. Crystallized ZTO films with a relative Zn content of 0.27 might not contain a single SnO2 phase which is observed in the films of the other compositions. Amorphous ZTO films showed decreasing electrical resistivities with increasing annealing temperature, having a minimum value of 1 × 10- 3 Ω cm. Upon crystallization, the resistivities increased drastically, which was attributed to poor crystallinity of the crystallized films. All the ZTO films were found to be degenerate semiconductors with non-parabolic conduction bands having effective masses varying from 0.15 to 0.3 in the carrier concentration range of 6 × 10 18 to 2 × 1020 cm- 3. As for a ZTO film with a relative Zn content of 0.27, the degree of non-parabolicity was much lower compared with films of the other compositions, leading to a relatively stable mobility over a wide range of carrier concentration.

Original languageEnglish
Pages (from-to)42-46
Number of pages5
JournalThin Solid Films
Volume494
Issue number1-2
DOIs
Publication statusPublished - 2006 Jan 3

Keywords

  • Sputtering
  • TCO
  • Transparent conducting oxide
  • Zinc stannate

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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