Electrical and recombination properties and deep traps spectra in MOCVD ELOG GaN layers

In-Hwan Lee, A. Y. Polyakov, N. B. Smirnov, A. V. Govorkov, A. V. Markov, S. J. Pearton

Research output: Contribution to journalConference article

26 Citations (Scopus)

Abstract

Electrical properties, deep levels spectra, spectra of microcathodoluminescence, diffusion lengths of minority carriers were studied in undoped GaN films grown by standard metallorganic chemical vapour deposition on sapphire and by the epitaxial lateral overgrowth technique (ELOG). It is shown that the total concentrations of shallow donors and of electron and hole traps are very considerably lower in the ELOG material compared to the ordinary MOCVD samples. MCL and electron beam induced current EBIC imaging of ELOG samples suggests that the dislocation density in the overgrown regions is on the order of 106 cm-2 while in-between these regions it is similar to the dislocation density in the standard material, about 109 cm-2. Local diffusion lengths were shown to follow the same trend as dislocation densities.

Original languageEnglish
Pages (from-to)2087-2090
Number of pages4
JournalPhysica Status Solidi (C) Current Topics in Solid State Physics
Volume3
DOIs
Publication statusPublished - 2006 Jul 31
Externally publishedYes
Event6th International Conference on Nitride Semiconductors, ICNS-6 - Bremen, Germany
Duration: 2005 Aug 282005 Sep 2

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metalorganic chemical vapor deposition
electrical properties
traps
diffusion length
minority carriers
sapphire
vapor deposition
electron beams
trends
electrons

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Electrical and recombination properties and deep traps spectra in MOCVD ELOG GaN layers. / Lee, In-Hwan; Polyakov, A. Y.; Smirnov, N. B.; Govorkov, A. V.; Markov, A. V.; Pearton, S. J.

In: Physica Status Solidi (C) Current Topics in Solid State Physics, Vol. 3, 31.07.2006, p. 2087-2090.

Research output: Contribution to journalConference article

Lee, In-Hwan ; Polyakov, A. Y. ; Smirnov, N. B. ; Govorkov, A. V. ; Markov, A. V. ; Pearton, S. J. / Electrical and recombination properties and deep traps spectra in MOCVD ELOG GaN layers. In: Physica Status Solidi (C) Current Topics in Solid State Physics. 2006 ; Vol. 3. pp. 2087-2090.
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AU - Pearton, S. J.

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AB - Electrical properties, deep levels spectra, spectra of microcathodoluminescence, diffusion lengths of minority carriers were studied in undoped GaN films grown by standard metallorganic chemical vapour deposition on sapphire and by the epitaxial lateral overgrowth technique (ELOG). It is shown that the total concentrations of shallow donors and of electron and hole traps are very considerably lower in the ELOG material compared to the ordinary MOCVD samples. MCL and electron beam induced current EBIC imaging of ELOG samples suggests that the dislocation density in the overgrown regions is on the order of 106 cm-2 while in-between these regions it is similar to the dislocation density in the standard material, about 109 cm-2. Local diffusion lengths were shown to follow the same trend as dislocation densities.

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