Electrical characteristics of V/Ti/Au contacts to Ga-polar and N-polar n-gan prepared by different methods

Joon Woo Jeon, Seong Han Park, Se Yeon Jung, Jihyung Moon, June O. Song, Gon Namgoong, Tae Yeon Seong

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

We have investigated the electrical properties of V (20 nm)/Ti (60 nm)/Au (20 nm) contacts to Ga- and N-polar n-GaN. Regardless of the crystal polarities, all the samples exhibit similar electrical characteristics. The as-deposited samples are ohmic. However, they become nonohmic when annealed at 300-500° C. The samples are ohmic again at 700°C. Based on the X-ray photoemission spectroscopy and Auger electron spectroscopy results, the ohmic and degradation behaviors are explained in terms of the formation of donorlike surface defects and Ga vacancies, which are generated by dry etching, the out-diffusion of Ga, and the formation of nitride phases.

Original languageEnglish
JournalElectrochemical and Solid-State Letters
Volume13
Issue number4
DOIs
Publication statusPublished - 2010 Feb 22

Fingerprint

Dry etching
Surface defects
Auger electron spectroscopy
Photoelectron spectroscopy
X ray spectroscopy
Nitrides
Vacancies
electric contacts
Electric properties
Degradation
Crystals
surface defects
Auger spectroscopy
nitrides
electron spectroscopy
polarity
photoelectric emission
electrical properties
etching
degradation

ASJC Scopus subject areas

  • Electrochemistry
  • Electrical and Electronic Engineering
  • Materials Science(all)
  • Chemical Engineering(all)
  • Physical and Theoretical Chemistry

Cite this

Electrical characteristics of V/Ti/Au contacts to Ga-polar and N-polar n-gan prepared by different methods. / Jeon, Joon Woo; Park, Seong Han; Jung, Se Yeon; Moon, Jihyung; Song, June O.; Namgoong, Gon; Seong, Tae Yeon.

In: Electrochemical and Solid-State Letters, Vol. 13, No. 4, 22.02.2010.

Research output: Contribution to journalArticle

Jeon, Joon Woo ; Park, Seong Han ; Jung, Se Yeon ; Moon, Jihyung ; Song, June O. ; Namgoong, Gon ; Seong, Tae Yeon. / Electrical characteristics of V/Ti/Au contacts to Ga-polar and N-polar n-gan prepared by different methods. In: Electrochemical and Solid-State Letters. 2010 ; Vol. 13, No. 4.
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